Matches in SemOpenAlex for { <https://semopenalex.org/work/W2034865188> ?p ?o ?g. }
- W2034865188 endingPage "372" @default.
- W2034865188 startingPage "367" @default.
- W2034865188 abstract "CrAlN/SiNx nanomultilayers with different SiNx layer thicknesses were synthesized by reactive magnetron sputtering. The microstructure and mechanical properties were investigated by X-ray diffraction, high-resolution transmission electron microscopy and nano-indentation techniques. The average crystallite size, microstrain and average dislocation density of CrAlN/SiNx nanomultilayers with different SiNx layer thicknesses were evaluated by X-ray diffraction line profile analysis method. The results indicated that, when SiNx layer thickness was below 0.6 nm, SiNx was forced to crystallize and grew epitaxially with CrAlN layers, resulting in the decrease of average dislocation density and the enhancement in hardness and elastic modulus. As the SiNx layer thickness further increases, the epitaxial growth was firstly interrupted and then crystallized SiNx layers transformed back to amorphous state, leading to the increase of average dislocation density and the decrease of hardness and elastic modulus. An energy balance model was established to explain the microstructure evolution." @default.
- W2034865188 created "2016-06-24" @default.
- W2034865188 creator A5000432967 @default.
- W2034865188 creator A5024636992 @default.
- W2034865188 creator A5030064573 @default.
- W2034865188 creator A5036190975 @default.
- W2034865188 creator A5043299987 @default.
- W2034865188 creator A5054831684 @default.
- W2034865188 creator A5077153113 @default.
- W2034865188 creator A5084440870 @default.
- W2034865188 date "2013-05-01" @default.
- W2034865188 modified "2023-09-28" @default.
- W2034865188 title "SiNx thickness dependent morphology and mechanical properties of CrAlN/SiNx nanomultilayers" @default.
- W2034865188 cites W1965907923 @default.
- W2034865188 cites W1968768353 @default.
- W2034865188 cites W1974795760 @default.
- W2034865188 cites W1977707509 @default.
- W2034865188 cites W1983824066 @default.
- W2034865188 cites W1994500546 @default.
- W2034865188 cites W1994947658 @default.
- W2034865188 cites W1997652591 @default.
- W2034865188 cites W2002475665 @default.
- W2034865188 cites W2004649225 @default.
- W2034865188 cites W2008415031 @default.
- W2034865188 cites W2011710158 @default.
- W2034865188 cites W2012543225 @default.
- W2034865188 cites W2014166387 @default.
- W2034865188 cites W2018162341 @default.
- W2034865188 cites W2024815227 @default.
- W2034865188 cites W2025988628 @default.
- W2034865188 cites W2034183626 @default.
- W2034865188 cites W2058869541 @default.
- W2034865188 cites W2059022607 @default.
- W2034865188 cites W2060555202 @default.
- W2034865188 cites W2068625793 @default.
- W2034865188 cites W2074066294 @default.
- W2034865188 cites W2081641545 @default.
- W2034865188 cites W2083837332 @default.
- W2034865188 cites W2086871567 @default.
- W2034865188 cites W2086933933 @default.
- W2034865188 cites W2089458789 @default.
- W2034865188 cites W2111231506 @default.
- W2034865188 cites W2111814152 @default.
- W2034865188 cites W2117462287 @default.
- W2034865188 cites W2140220452 @default.
- W2034865188 cites W2141040653 @default.
- W2034865188 cites W2143628367 @default.
- W2034865188 cites W2150112771 @default.
- W2034865188 cites W2155292958 @default.
- W2034865188 cites W2167836842 @default.
- W2034865188 cites W2312774195 @default.
- W2034865188 doi "https://doi.org/10.1016/j.tsf.2013.02.049" @default.
- W2034865188 hasPublicationYear "2013" @default.
- W2034865188 type Work @default.
- W2034865188 sameAs 2034865188 @default.
- W2034865188 citedByCount "22" @default.
- W2034865188 countsByYear W20348651882013 @default.
- W2034865188 countsByYear W20348651882014 @default.
- W2034865188 countsByYear W20348651882015 @default.
- W2034865188 countsByYear W20348651882016 @default.
- W2034865188 countsByYear W20348651882017 @default.
- W2034865188 countsByYear W20348651882018 @default.
- W2034865188 countsByYear W20348651882020 @default.
- W2034865188 countsByYear W20348651882021 @default.
- W2034865188 countsByYear W20348651882022 @default.
- W2034865188 countsByYear W20348651882023 @default.
- W2034865188 crossrefType "journal-article" @default.
- W2034865188 hasAuthorship W2034865188A5000432967 @default.
- W2034865188 hasAuthorship W2034865188A5024636992 @default.
- W2034865188 hasAuthorship W2034865188A5030064573 @default.
- W2034865188 hasAuthorship W2034865188A5036190975 @default.
- W2034865188 hasAuthorship W2034865188A5043299987 @default.
- W2034865188 hasAuthorship W2034865188A5054831684 @default.
- W2034865188 hasAuthorship W2034865188A5077153113 @default.
- W2034865188 hasAuthorship W2034865188A5084440870 @default.
- W2034865188 hasConcept C110738630 @default.
- W2034865188 hasConcept C137637335 @default.
- W2034865188 hasConcept C146088050 @default.
- W2034865188 hasConcept C159122135 @default.
- W2034865188 hasConcept C159985019 @default.
- W2034865188 hasConcept C171250308 @default.
- W2034865188 hasConcept C185592680 @default.
- W2034865188 hasConcept C19067145 @default.
- W2034865188 hasConcept C191897082 @default.
- W2034865188 hasConcept C192562407 @default.
- W2034865188 hasConcept C22423302 @default.
- W2034865188 hasConcept C2779227376 @default.
- W2034865188 hasConcept C2780902562 @default.
- W2034865188 hasConcept C43486711 @default.
- W2034865188 hasConcept C49326732 @default.
- W2034865188 hasConcept C56052488 @default.
- W2034865188 hasConcept C61427134 @default.
- W2034865188 hasConcept C8010536 @default.
- W2034865188 hasConcept C87976508 @default.
- W2034865188 hasConceptScore W2034865188C110738630 @default.
- W2034865188 hasConceptScore W2034865188C137637335 @default.
- W2034865188 hasConceptScore W2034865188C146088050 @default.
- W2034865188 hasConceptScore W2034865188C159122135 @default.