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- W2034876868 abstract "We introduce the Resonant ATR technique, a new non-destructive technique for the characterization of multilayer structures in terms of the thickness and composition of the various layers. After a review of the basic principles, the technique is exemplified through its application to the layer thickness determination of wafers used in the manufacture of heterostructure lasers." @default.
- W2034876868 created "2016-06-24" @default.
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- W2034876868 date "1987-04-22" @default.
- W2034876868 modified "2023-09-23" @default.
- W2034876868 title "Resonant Atr (Attenuated Total Reflection) Spectroscopy & The Nondestructive Characterization Of Multilayer Structures" @default.
- W2034876868 doi "https://doi.org/10.1117/12.940925" @default.
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