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- W2034907511 endingPage "179" @default.
- W2034907511 startingPage "174" @default.
- W2034907511 abstract "A new method to determine depth profiles for carrier concentration in semiconductor has been developed using infrared ellipsometry. The method is based on theoretical calculations which have shown that a carrier profile can be sensitively described by its infrared ellipsometric parameters as function of the incident angle. Through measuring ellipsometric parameters and performing computer anaylsis, carrier profiles for shallow‐doped samples made by arsenic ion implantation were nondestructively determined. The results are in good agreement with those from the conventional anodization stripping method." @default.
- W2034907511 created "2016-06-24" @default.
- W2034907511 creator A5016183886 @default.
- W2034907511 creator A5024166390 @default.
- W2034907511 creator A5031780212 @default.
- W2034907511 creator A5078280361 @default.
- W2034907511 date "1984-01-01" @default.
- W2034907511 modified "2023-09-27" @default.
- W2034907511 title "Optical Measurement of Carrier Profiles in Silicon" @default.
- W2034907511 doi "https://doi.org/10.1149/1.2115502" @default.
- W2034907511 hasPublicationYear "1984" @default.
- W2034907511 type Work @default.
- W2034907511 sameAs 2034907511 @default.
- W2034907511 citedByCount "6" @default.
- W2034907511 crossrefType "journal-article" @default.
- W2034907511 hasAuthorship W2034907511A5016183886 @default.
- W2034907511 hasAuthorship W2034907511A5024166390 @default.
- W2034907511 hasAuthorship W2034907511A5031780212 @default.
- W2034907511 hasAuthorship W2034907511A5078280361 @default.
- W2034907511 hasConcept C108225325 @default.
- W2034907511 hasConcept C113196181 @default.
- W2034907511 hasConcept C120665830 @default.
- W2034907511 hasConcept C121332964 @default.
- W2034907511 hasConcept C158355884 @default.
- W2034907511 hasConcept C159985019 @default.
- W2034907511 hasConcept C171250308 @default.
- W2034907511 hasConcept C18293161 @default.
- W2034907511 hasConcept C185592680 @default.
- W2034907511 hasConcept C19067145 @default.
- W2034907511 hasConcept C191897082 @default.
- W2034907511 hasConcept C192562407 @default.
- W2034907511 hasConcept C22016385 @default.
- W2034907511 hasConcept C2992437359 @default.
- W2034907511 hasConcept C41952129 @default.
- W2034907511 hasConcept C43617362 @default.
- W2034907511 hasConcept C49040817 @default.
- W2034907511 hasConcept C502230775 @default.
- W2034907511 hasConcept C513153333 @default.
- W2034907511 hasConcept C544956773 @default.
- W2034907511 hasConcept C57863236 @default.
- W2034907511 hasConceptScore W2034907511C108225325 @default.
- W2034907511 hasConceptScore W2034907511C113196181 @default.
- W2034907511 hasConceptScore W2034907511C120665830 @default.
- W2034907511 hasConceptScore W2034907511C121332964 @default.
- W2034907511 hasConceptScore W2034907511C158355884 @default.
- W2034907511 hasConceptScore W2034907511C159985019 @default.
- W2034907511 hasConceptScore W2034907511C171250308 @default.
- W2034907511 hasConceptScore W2034907511C18293161 @default.
- W2034907511 hasConceptScore W2034907511C185592680 @default.
- W2034907511 hasConceptScore W2034907511C19067145 @default.
- W2034907511 hasConceptScore W2034907511C191897082 @default.
- W2034907511 hasConceptScore W2034907511C192562407 @default.
- W2034907511 hasConceptScore W2034907511C22016385 @default.
- W2034907511 hasConceptScore W2034907511C2992437359 @default.
- W2034907511 hasConceptScore W2034907511C41952129 @default.
- W2034907511 hasConceptScore W2034907511C43617362 @default.
- W2034907511 hasConceptScore W2034907511C49040817 @default.
- W2034907511 hasConceptScore W2034907511C502230775 @default.
- W2034907511 hasConceptScore W2034907511C513153333 @default.
- W2034907511 hasConceptScore W2034907511C544956773 @default.
- W2034907511 hasConceptScore W2034907511C57863236 @default.
- W2034907511 hasIssue "1" @default.
- W2034907511 hasLocation W20349075111 @default.
- W2034907511 hasOpenAccess W2034907511 @default.
- W2034907511 hasPrimaryLocation W20349075111 @default.
- W2034907511 hasRelatedWork W1965576843 @default.
- W2034907511 hasRelatedWork W1968968430 @default.
- W2034907511 hasRelatedWork W2010750421 @default.
- W2034907511 hasRelatedWork W2012760547 @default.
- W2034907511 hasRelatedWork W2044197029 @default.
- W2034907511 hasRelatedWork W2046376221 @default.
- W2034907511 hasRelatedWork W2046703922 @default.
- W2034907511 hasRelatedWork W2105103762 @default.
- W2034907511 hasRelatedWork W2172050517 @default.
- W2034907511 hasRelatedWork W3026897150 @default.
- W2034907511 hasVolume "131" @default.
- W2034907511 isParatext "false" @default.
- W2034907511 isRetracted "false" @default.
- W2034907511 magId "2034907511" @default.
- W2034907511 workType "article" @default.