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- W2034931161 abstract "Low to mid spatial frequency roughness of lens surfaces is one of key quality issues for projection optics of lithography tools. Advanced metrology instruments for this spatial frequency roughness measurement are applied to optics fabrication." @default.
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- W2034931161 date "2006-01-01" @default.
- W2034931161 modified "2023-09-23" @default.
- W2034931161 title "Advanced Metrology Tools Applied for Lithography Optics Fabrication and Testing" @default.
- W2034931161 doi "https://doi.org/10.1364/oft.2006.ofwc1" @default.
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