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• W2034931500 abstract "The chemisorption binding of Co and Fe to cavity walls in Si was quantitatively characterized in the temperature range 973–1273 K in order to evaluate the efficacy of cavities for impurity gettering. The cavities were formed by He ion implantation and annealing. Then, with the solution concentration of Co or Fe being held at the solid solubility through prior formation of excess metal-silicide phase, the equilibrium number of metal atoms bound to the cavities was measured. Using this information in conjunction with published solubilities, a binding free energy relative to interstitial solution was extracted. The binding free energies for cavity-wall chemisorption of Co and Fe were found to be less than those for precipitation of the respective silicide phases, a reversal of the ordering previously observed by us for Cu and Au. Nevertheless, model calculations indicate that the chemisorption mechanism is important together with silicide precipitation for cavity gettering of all four elements. The results of this work, taken with the known thermal stability and the anticipated device-side compatibility of cavities, suggest that these sinks will prove attractive for gettering." @default.
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• W2034931500 date "1996-10-01" @default.
• W2034931500 modified "2023-10-09" @default.
• W2034931500 title "Binding of cobalt and iron to cavities in silicon" @default.
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• W2034931500 doi "https://doi.org/10.1063/1.363322" @default.
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