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Matches in SemOpenAlex for { <https://semopenalex.org/work/W2034932097> ?p ?o ?g. }

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• W2034932097 abstract "We have studied the electrically induced off-plane surface displacement on two microelectronic devices using scanning Joule expansion microscopy (SJEM). We present the experimental method and surface displacement results. We show that they can be successfully compared with surface displacement images obtained using an optical interferometry method. We also present thermal images using scanning thermal microscopy (SThM) technique to underline that SJEM is more adapted to higher frequency measurements. The performances of the three methods are compared." @default.
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• W2034932097 date "2009-09-01" @default.
• W2034932097 modified "2023-10-10" @default.
• W2034932097 title "Joule expansion imaging techniques on microlectronic devices" @default.
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• W2034932097 doi "https://doi.org/10.1016/j.mejo.2008.04.016" @default.
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