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• W2034943225 abstract "This review discusses some of the issues that will govern future commercial adoption of ion beam nanoscale fabrication and lithography, with special reference to some major fields of application. Selected recent research advances are highlighted, as they indicate new experimental successes, new insights into complex ion interaction mechanisms, and a fast evolving variety of advanced instrumentation and fabrication resources. It is evident that robust fabrication involving few-nanometer features will be enabled by strategic applications of ion beams, especially if they can be coupled with directed self-assembly." @default.
• W2034943225 created "2016-06-24" @default.
• W2034943225 creator A5004672262 @default.
• W2034943225 date "2012-02-01" @default.
• W2034943225 modified "2023-09-26" @default.
• W2034943225 title "Ion beam nanoscale fabrication and lithography—A review" @default.
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• W2034943225 doi "https://doi.org/10.1016/j.apsusc.2011.11.074" @default.
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