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- W2034971894 abstract "In the fabrication of phase change memory devices, HBr/He gas is employed in patterning Ge<sub>2</sub>Sb<sub>2</sub>Te<sub>5</sub> (GST) because it is damage free to GST sidewall. Accurate and reproducible endpoint detection methods are necessary in this etching process. In-situ optical emission spectroscopy (OES) is collected and analyzed to control the GST etching process due to its non-invasiveness. By analyzing the light emitted from plasma, we report an effective etch endpoint detection method for GST etching process is developed and the results are also confirmed using scanning electron micrographs." @default.
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- W2034971894 date "2013-01-24" @default.
- W2034971894 modified "2023-09-27" @default.
- W2034971894 title "Optical emission spectroscopy analysis for Ge2Sb2Te5etching endpoint detection in HBr/He plasma" @default.
- W2034971894 doi "https://doi.org/10.1117/12.2018658" @default.
- W2034971894 hasPublicationYear "2013" @default.
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