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- W2034981073 abstract "We report the properties of an ultrathin Al2O3–TiO2 dielectric stack with the equivalent-oxide thickness =1.0 nm. The stack exhibits nondiscernable interfacial layer on Si, and absence of serious Al2O3–TiO2 intermixing. Inelastic electron tunneling spectroscopy (IETS) has been used to provide a wealth of information concerning the phonons, bonding vibration modes, and traps in the Al2O3–TiO2 gate dielectric stack as well as its interfaces in a metal-oxide-Si structure. The IETS spectra before and after forming gas annealing suggest that the reduction of traps is related to the formation of Si–H bonds at the oxide-Si interface." @default.
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- W2034981073 date "2010-11-15" @default.
- W2034981073 modified "2023-09-27" @default.
- W2034981073 title "Inelastic electron tunneling spectroscopy study of ultrathin Al2O3–TiO2 dielectric stack on Si" @default.
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- W2034981073 doi "https://doi.org/10.1063/1.3518478" @default.
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