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- W2034990159 abstract "Abstract The present experiments demonstrate the epitaxial growth (EG) and selective epitaxial growth (SEG) of GaInP by low-pressure metalorganic chemical vapor deposition (LP-MOCVD) using ethyldimethylindium (EDMI), trimethylindium (TMI), trimethylgallium (TMG) and triethylgallium (TEG) as group III sources. In epitaxial growth of GaInP, the Ga incorporation efficiency using TEG + EDMI is found to be lower than those using other combinations. Completely selective epitaxy using TEGa + EDMIn can be achieved at a growth temperature of 675°C and at a growth pressure of 40 Torr, while other combinations (TEG + TMI, TMG + TMI, and TMG + EDMI) can achieve SEG of GaInP at 650°C. High resolution double-crystal X-ray measurements are used to investigate the compositional variation in the selectively epitaxial-grown area." @default.
- W2034990159 created "2016-06-24" @default.
- W2034990159 creator A5028390089 @default.
- W2034990159 creator A5053614483 @default.
- W2034990159 creator A5055762478 @default.
- W2034990159 creator A5081316733 @default.
- W2034990159 date "1994-12-01" @default.
- W2034990159 modified "2023-10-18" @default.
- W2034990159 title "Selective epitaxial growth of GaInP by LP-MOCVD using ethyldimethylindium, trimethylindium, trimethylgallium and triethylgallium as group III sources" @default.
- W2034990159 cites W1986330866 @default.
- W2034990159 cites W1997357532 @default.
- W2034990159 cites W2028891220 @default.
- W2034990159 cites W2050480519 @default.
- W2034990159 cites W2055732758 @default.
- W2034990159 cites W2089575597 @default.
- W2034990159 cites W2090855273 @default.
- W2034990159 cites W2092908978 @default.
- W2034990159 doi "https://doi.org/10.1016/0169-4332(94)90200-3" @default.
- W2034990159 hasPublicationYear "1994" @default.
- W2034990159 type Work @default.
- W2034990159 sameAs 2034990159 @default.
- W2034990159 citedByCount "1" @default.
- W2034990159 crossrefType "journal-article" @default.
- W2034990159 hasAuthorship W2034990159A5028390089 @default.
- W2034990159 hasAuthorship W2034990159A5053614483 @default.
- W2034990159 hasAuthorship W2034990159A5055762478 @default.
- W2034990159 hasAuthorship W2034990159A5081316733 @default.
- W2034990159 hasConcept C110738630 @default.
- W2034990159 hasConcept C113196181 @default.
- W2034990159 hasConcept C121332964 @default.
- W2034990159 hasConcept C175665537 @default.
- W2034990159 hasConcept C178790620 @default.
- W2034990159 hasConcept C185592680 @default.
- W2034990159 hasConcept C26456737 @default.
- W2034990159 hasConcept C2775895354 @default.
- W2034990159 hasConcept C2779227376 @default.
- W2034990159 hasConcept C2779668472 @default.
- W2034990159 hasConcept C2780464664 @default.
- W2034990159 hasConcept C30646810 @default.
- W2034990159 hasConcept C57410435 @default.
- W2034990159 hasConcept C8010536 @default.
- W2034990159 hasConcept C97355855 @default.
- W2034990159 hasConceptScore W2034990159C110738630 @default.
- W2034990159 hasConceptScore W2034990159C113196181 @default.
- W2034990159 hasConceptScore W2034990159C121332964 @default.
- W2034990159 hasConceptScore W2034990159C175665537 @default.
- W2034990159 hasConceptScore W2034990159C178790620 @default.
- W2034990159 hasConceptScore W2034990159C185592680 @default.
- W2034990159 hasConceptScore W2034990159C26456737 @default.
- W2034990159 hasConceptScore W2034990159C2775895354 @default.
- W2034990159 hasConceptScore W2034990159C2779227376 @default.
- W2034990159 hasConceptScore W2034990159C2779668472 @default.
- W2034990159 hasConceptScore W2034990159C2780464664 @default.
- W2034990159 hasConceptScore W2034990159C30646810 @default.
- W2034990159 hasConceptScore W2034990159C57410435 @default.
- W2034990159 hasConceptScore W2034990159C8010536 @default.
- W2034990159 hasConceptScore W2034990159C97355855 @default.
- W2034990159 hasLocation W20349901591 @default.
- W2034990159 hasOpenAccess W2034990159 @default.
- W2034990159 hasPrimaryLocation W20349901591 @default.
- W2034990159 hasRelatedWork W1971335111 @default.
- W2034990159 hasRelatedWork W1985518002 @default.
- W2034990159 hasRelatedWork W1992756157 @default.
- W2034990159 hasRelatedWork W2014451740 @default.
- W2034990159 hasRelatedWork W2015400351 @default.
- W2034990159 hasRelatedWork W2025328145 @default.
- W2034990159 hasRelatedWork W2040343321 @default.
- W2034990159 hasRelatedWork W2047681430 @default.
- W2034990159 hasRelatedWork W2050943900 @default.
- W2034990159 hasRelatedWork W2051648443 @default.
- W2034990159 hasRelatedWork W2055722673 @default.
- W2034990159 hasRelatedWork W2067081569 @default.
- W2034990159 hasRelatedWork W2068322090 @default.
- W2034990159 hasRelatedWork W2075901093 @default.
- W2034990159 hasRelatedWork W2076177710 @default.
- W2034990159 hasRelatedWork W2081362218 @default.
- W2034990159 hasRelatedWork W2087844045 @default.
- W2034990159 hasRelatedWork W2218789828 @default.
- W2034990159 hasRelatedWork W2567490314 @default.
- W2034990159 hasRelatedWork W3021603391 @default.
- W2034990159 isParatext "false" @default.
- W2034990159 isRetracted "false" @default.
- W2034990159 magId "2034990159" @default.
- W2034990159 workType "article" @default.