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- W2034996430 abstract "This paper reports the quantitative analysis of oxygen in GaAs epitaxial layers by a CAMECA IMS 300 secondary ion mass spectrometer. It is shown that the residual oxygen pressure of the apparatus (∼1×10 −7 torr) does not affect the analysis. On the basis of standard samples analysed by activation with tritons [ 16 O(T,n) 18 F] the limit of detection of oxygen in GaAs is found to be ∼0.01 ppm.at. Some results on oxygen depth profiling in epitaxial layers are presented." @default.
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- W2034996430 date "1978-02-01" @default.
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- W2034996430 title "Quantitative analysis of oxygen in thin epitaxial layers of GaAs by SIMS" @default.
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- W2034996430 doi "https://doi.org/10.1016/0029-554x(78)90923-0" @default.
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