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- W2035005207 abstract "As fundamental research to deposit cubic boron nitride (BN) films on curved substrates by the ion-beam-assisted vapor deposition method using boron deposition and the irradiation of nitrogen and argon ions, BN films were deposited on Si substrates by waving them and continuously changing the angle of ion irradiation. As a result, it has become clear that cubic BN films are deposited even when the waving angle is ±90°, and that the cubic BN films are deposited on curved substrate surfaces when the substrates are rotated or waved." @default.
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- W2035005207 date "1993-05-01" @default.
- W2035005207 modified "2023-10-18" @default.
- W2035005207 title "Fundamental research on the deposition of cubic boron nitride films on curved substrates by ion-beam-assisted vapor deposition" @default.
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