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• W2035051313 abstract "In this paper we describe the fabrication and frequency characterization of different structures intended for the lateral excitation of shear modes in AlN c-axis-oriented films, which are at the same time designed to minimize the excitation of longitudinal modes. Laterally excited resonators were built on partially metallic (SiO <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</sub> , W) and insulating (SiOC, Si <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>3</sub> N <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>4</sub> ) acoustic mirrors built on silicon substrates, and on insulating mirrors (SiO <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</sub> , TaO <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>x</sub> ) built on insulating glass plates. TiO <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>x</sub> seed layers were used to stimulate the growth of highly c-axis oriented AlN films, which was confirmed by XRD and SAW measurements. Coplanar Mo electrodes of different geometries were defined on top of the AlN films to excite the shear modes. All the structures analyzed displayed a clear longitudinal mode, corresponding to an acoustic velocity of 11000 m/s, but a null or extremely weak shear response corresponding to a sound velocity of around 6350 m/s. The simulation of the frequency response based on Mason's model confirms that the shear resonance is extremely weak. The observed longitudinal modes are attributed either to the field applied between the electrodes and a conductive plane (metallic layer or Si substrate) or to the electric field parallel to the c-axis in the edges of the electrodes or in tilted grains. The low excitation of shear modes is attributed to the very low values of electric field strength parallel to the surface." @default.
• W2035051313 created "2016-06-24" @default.
• W2035051313 creator A5001155921 @default.
• W2035051313 creator A5019229508 @default.
• W2035051313 creator A5020934002 @default.
• W2035051313 creator A5020954319 @default.
• W2035051313 creator A5032372352 @default.
• W2035051313 creator A5046226290 @default.
• W2035051313 date "2012-10-01" @default.
• W2035051313 modified "2023-10-01" @default.
• W2035051313 title "On the lateral excitation of shear modes in AlN layered resonators" @default.
• W2035051313 cites W1965234839 @default.
• W2035051313 cites W1969468359 @default.
• W2035051313 cites W1990731091 @default.
• W2035051313 cites W2005167308 @default.
• W2035051313 cites W2007861674 @default.
• W2035051313 cites W2029853272 @default.
• W2035051313 cites W2030673991 @default.
• W2035051313 cites W2044563340 @default.
• W2035051313 cites W2053214712 @default.
• W2035051313 cites W2059011123 @default.
• W2035051313 cites W2114017508 @default.
• W2035051313 cites W2127560958 @default.
• W2035051313 cites W2138660905 @default.
• W2035051313 cites W2141186037 @default.
• W2035051313 cites W2143727927 @default.
• W2035051313 cites W2145628973 @default.
• W2035051313 cites W2165232502 @default.
• W2035051313 cites W2167357466 @default.
• W2035051313 cites W2538602041 @default.
• W2035051313 cites W1564532942 @default.
• W2035051313 doi "https://doi.org/10.1109/ultsym.2012.0133" @default.
• W2035051313 hasPublicationYear "2012" @default.
• W2035051313 type Work @default.
• W2035051313 sameAs 2035051313 @default.
• W2035051313 citedByCount "2" @default.
• W2035051313 countsByYear W20350513132013 @default.
• W2035051313 countsByYear W20350513132015 @default.
• W2035051313 crossrefType "proceedings-article" @default.
• W2035051313 hasAuthorship W2035051313A5001155921 @default.
• W2035051313 hasAuthorship W2035051313A5019229508 @default.
• W2035051313 hasAuthorship W2035051313A5020934002 @default.
• W2035051313 hasAuthorship W2035051313A5020954319 @default.
• W2035051313 hasAuthorship W2035051313A5032372352 @default.
• W2035051313 hasAuthorship W2035051313A5046226290 @default.
• W2035051313 hasBestOaLocation W20350513132 @default.
• W2035051313 hasConcept C121332964 @default.
• W2035051313 hasConcept C159985019 @default.
• W2035051313 hasConcept C192562407 @default.
• W2035051313 hasConcept C49040817 @default.
• W2035051313 hasConcept C62520636 @default.
• W2035051313 hasConcept C83581075 @default.
• W2035051313 hasConcept C96035792 @default.
• W2035051313 hasConcept C97126364 @default.
• W2035051313 hasConceptScore W2035051313C121332964 @default.
• W2035051313 hasConceptScore W2035051313C159985019 @default.
• W2035051313 hasConceptScore W2035051313C192562407 @default.
• W2035051313 hasConceptScore W2035051313C49040817 @default.
• W2035051313 hasConceptScore W2035051313C62520636 @default.
• W2035051313 hasConceptScore W2035051313C83581075 @default.
• W2035051313 hasConceptScore W2035051313C96035792 @default.
• W2035051313 hasConceptScore W2035051313C97126364 @default.
• W2035051313 hasLocation W20350513131 @default.
• W2035051313 hasLocation W20350513132 @default.
• W2035051313 hasOpenAccess W2035051313 @default.
• W2035051313 hasPrimaryLocation W20350513131 @default.
• W2035051313 hasRelatedWork W1972415289 @default.
• W2035051313 hasRelatedWork W1974646357 @default.
• W2035051313 hasRelatedWork W1997077371 @default.
• W2035051313 hasRelatedWork W2055326043 @default.
• W2035051313 hasRelatedWork W2059585202 @default.
• W2035051313 hasRelatedWork W2066670661 @default.
• W2035051313 hasRelatedWork W2075665465 @default.
• W2035051313 hasRelatedWork W2077782899 @default.
• W2035051313 hasRelatedWork W2086223891 @default.
• W2035051313 hasRelatedWork W2165700642 @default.
• W2035051313 isParatext "false" @default.
• W2035051313 isRetracted "false" @default.
• W2035051313 magId "2035051313" @default.
• W2035051313 workType "article" @default.