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- W2035072015 abstract "Diamond-like Carbon(DLC) films are deposited by Ti:Sapphire femtosecond pulsed laser(800nm, 120fs-2ps, 3.3W, 1-1000Hz) at room temperature. The substrate is n-type Si(100), and the target is 99.999%-purity graphite. After a great lot of experiments, optimal technical parameters, which are 1000Hz repetition frequency, 120fs pulse-width, 5cm-distance between target and underlay and 10<sup>14</sup>W/cm<sup>2</sup> power-density, were used to deposite 443nm thick DLC film. Raman spectrum measurement shows a broad peak with a center at 1550 cm<sup>-1</sup> for all films, similar to those of typical diamond-like carbon films prepared using other methods. And sp<sup>3</sup>-bond content reaches 67% analyzed by XPS. There is no nick on the film when scraped 10<sup>5</sup> times by a RS-5600 friction test machine under the pressure of 9.8N. The infrared transmittance increases along with the oxygen pressure when between 0.03 Pa and 2 Pa. The result shows that oxygen is effective in etching sp<sup>2</sup>-bond content. The extreme infrared transmittance of Si slice deposited DLC film on single surface is higher than 64% at 3-5μm, superior to 53% when being uncoated." @default.
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- W2035072015 date "2009-05-11" @default.
- W2035072015 modified "2023-09-23" @default.
- W2035072015 title "Infrared antireflection DLC films by femtosecond pulsed laser deposition" @default.
- W2035072015 doi "https://doi.org/10.1117/12.830809" @default.
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