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- W2035148906 abstract "Nowadays, Ion Beam Sputter (IBS) processes are very well optimized on an empirical basis. To achieve further progresses, a modification of the IBS process by guiding the coating material using an axial magnetic field and an additional electrical field has been studied. The electro-magnetic (EM) field leads to a significant change in plasma properties and deposition rate distributions, whereas an increase in deposition rate along the centerline of the axial EM field around 150% was observed. These fundamental studies on the prototype are the basis for the development of an applicable and workable design of a separation device." @default.
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- W2035148906 date "2013-06-03" @default.
- W2035148906 modified "2023-10-10" @default.
- W2035148906 title "Towards an electro-magnetic field separation of deposited material implemented in an ion beam sputter process" @default.
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