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- W2035149372 abstract "We present a theoretical model for mobile ion contamination in a silicon microelectromechanical resonator. In the model both drift and diffusion of the mobile charge in dielectric films are taken into account. The model is verified through a comparison to existing experimental data. We show that the model can describe the frequency drift of resonators in a wide temperature range." @default.
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- W2035149372 date "2011-08-15" @default.
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- W2035149372 title "Modeling the effect of mobile ion contamination on the stability of a microelectromechanical resonator" @default.
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- W2035149372 doi "https://doi.org/10.1063/1.3622511" @default.
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