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- W2035179496 abstract "Silicon oxide thin films were grown from the liquid source, polysilazane, by using mist chemical vapor deposition (CVD) at temperatures of 200–350 °C. The films were grown with a reasonable growth rate of 12 nm/min at the temperature of 200 °C, and they showed resistivity of the order of 10 13 Ω·cm, although the incorporation of carbon and oxygen remains as a problem to be discussed and solved in the future. The results are encouraging for the future application of mist CVD for the growth of silicon oxide films on plastic substrates." @default.
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- W2035179496 date "2012-08-08" @default.
- W2035179496 modified "2023-10-18" @default.
- W2035179496 title "Fabrication of Silicon Oxide Thin Films by Mist Chemical Vapor Deposition Method from Polysilazane and Ozone as Sources" @default.
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- W2035179496 doi "https://doi.org/10.1143/jjap.51.090201" @default.
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