Matches in SemOpenAlex for { <https://semopenalex.org/work/W2035191723> ?p ?o ?g. }
Showing items 1 to 85 of
85
with 100 items per page.
- W2035191723 abstract "Vacancy depth profiles in silicon wafers—installed by Rapid Thermal Annealing and monitored by Pt diffusion—show, upon subsequent annealing at 975 or 950 °C, a peculiar evolution: the concentration profile goes down without any trace of vacancy out-diffusion. The estimated apparent diffusivity is less than 10−7 cm2/s at 975 °C. The monitored vacancy species is tentatively identified as a “slow vacancy” that was recently concluded to exist along with other (highly mobile) vacancy species." @default.
- W2035191723 created "2016-06-24" @default.
- W2035191723 creator A5017080697 @default.
- W2035191723 creator A5032353509 @default.
- W2035191723 creator A5072591299 @default.
- W2035191723 date "2014-01-20" @default.
- W2035191723 modified "2023-09-27" @default.
- W2035191723 title "Relaxation of vacancy depth profiles in silicon wafers: A low apparent diffusivity of vacancy species" @default.
- W2035191723 cites W2003186928 @default.
- W2035191723 cites W2011691956 @default.
- W2035191723 cites W2014821571 @default.
- W2035191723 cites W2018524972 @default.
- W2035191723 cites W2023815716 @default.
- W2035191723 cites W2036427913 @default.
- W2035191723 cites W2040607498 @default.
- W2035191723 cites W2050192646 @default.
- W2035191723 cites W2072379895 @default.
- W2035191723 cites W2099084623 @default.
- W2035191723 doi "https://doi.org/10.1063/1.4863225" @default.
- W2035191723 hasPublicationYear "2014" @default.
- W2035191723 type Work @default.
- W2035191723 sameAs 2035191723 @default.
- W2035191723 citedByCount "7" @default.
- W2035191723 countsByYear W20351917232014 @default.
- W2035191723 countsByYear W20351917232015 @default.
- W2035191723 countsByYear W20351917232017 @default.
- W2035191723 countsByYear W20351917232019 @default.
- W2035191723 countsByYear W20351917232023 @default.
- W2035191723 crossrefType "journal-article" @default.
- W2035191723 hasAuthorship W2035191723A5017080697 @default.
- W2035191723 hasAuthorship W2035191723A5032353509 @default.
- W2035191723 hasAuthorship W2035191723A5072591299 @default.
- W2035191723 hasBestOaLocation W20351917232 @default.
- W2035191723 hasConcept C113196181 @default.
- W2035191723 hasConcept C114221277 @default.
- W2035191723 hasConcept C121332964 @default.
- W2035191723 hasConcept C160671074 @default.
- W2035191723 hasConcept C171250308 @default.
- W2035191723 hasConcept C185592680 @default.
- W2035191723 hasConcept C191897082 @default.
- W2035191723 hasConcept C192562407 @default.
- W2035191723 hasConcept C26873012 @default.
- W2035191723 hasConcept C2777855556 @default.
- W2035191723 hasConcept C37668627 @default.
- W2035191723 hasConcept C43617362 @default.
- W2035191723 hasConcept C544956773 @default.
- W2035191723 hasConcept C69357855 @default.
- W2035191723 hasConcept C8010536 @default.
- W2035191723 hasConcept C97355855 @default.
- W2035191723 hasConceptScore W2035191723C113196181 @default.
- W2035191723 hasConceptScore W2035191723C114221277 @default.
- W2035191723 hasConceptScore W2035191723C121332964 @default.
- W2035191723 hasConceptScore W2035191723C160671074 @default.
- W2035191723 hasConceptScore W2035191723C171250308 @default.
- W2035191723 hasConceptScore W2035191723C185592680 @default.
- W2035191723 hasConceptScore W2035191723C191897082 @default.
- W2035191723 hasConceptScore W2035191723C192562407 @default.
- W2035191723 hasConceptScore W2035191723C26873012 @default.
- W2035191723 hasConceptScore W2035191723C2777855556 @default.
- W2035191723 hasConceptScore W2035191723C37668627 @default.
- W2035191723 hasConceptScore W2035191723C43617362 @default.
- W2035191723 hasConceptScore W2035191723C544956773 @default.
- W2035191723 hasConceptScore W2035191723C69357855 @default.
- W2035191723 hasConceptScore W2035191723C8010536 @default.
- W2035191723 hasConceptScore W2035191723C97355855 @default.
- W2035191723 hasIssue "3" @default.
- W2035191723 hasLocation W20351917231 @default.
- W2035191723 hasLocation W20351917232 @default.
- W2035191723 hasOpenAccess W2035191723 @default.
- W2035191723 hasPrimaryLocation W20351917231 @default.
- W2035191723 hasRelatedWork W1980509651 @default.
- W2035191723 hasRelatedWork W2003733153 @default.
- W2035191723 hasRelatedWork W2020656877 @default.
- W2035191723 hasRelatedWork W2055420989 @default.
- W2035191723 hasRelatedWork W2057972624 @default.
- W2035191723 hasRelatedWork W2065758669 @default.
- W2035191723 hasRelatedWork W2070201262 @default.
- W2035191723 hasRelatedWork W2074320841 @default.
- W2035191723 hasRelatedWork W2086109245 @default.
- W2035191723 hasRelatedWork W2004589289 @default.
- W2035191723 hasVolume "104" @default.
- W2035191723 isParatext "false" @default.
- W2035191723 isRetracted "false" @default.
- W2035191723 magId "2035191723" @default.
- W2035191723 workType "article" @default.