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- W2035207624 endingPage "2733" @default.
- W2035207624 startingPage "2726" @default.
- W2035207624 abstract "We describe radio frequency (rf) analysis of technological plasmas at the 13.56 MHz fundamental drive frequency and integer narrow-band harmonics up to n = 9. In particular, we demonstrate the use of harmonic amplitude information as a process end-point diagnostic. Using very high frequency (vhf) techniques, we construct non-invasive ex situ remote-coupled probes: a diplexer, an equal-ratio-arm bridge, and a dual directional coupler used as a single directional device. These probes bolt into the plasma-tool 50 Ω transmission-line between the rf generator and matching network, and hence do not require modification of the plasma tool. The 50 Ω probe environment produces repeatable measurements of the chamber capacitance and narrow-band harmonic amplitude with an end-point detection sensitivity corresponding to a 2 dB change in the harmonic amplitude with the removal of 1 cm2 of photoresist." @default.
- W2035207624 created "2016-06-24" @default.
- W2035207624 creator A5016050548 @default.
- W2035207624 creator A5018890261 @default.
- W2035207624 creator A5043594883 @default.
- W2035207624 creator A5074513421 @default.
- W2035207624 creator A5078916182 @default.
- W2035207624 date "2001-09-05" @default.
- W2035207624 modified "2023-09-26" @default.
- W2035207624 title "Rf probe technology for the next generation of technological plasmas" @default.
- W2035207624 cites W1588590815 @default.
- W2035207624 cites W1626731860 @default.
- W2035207624 cites W1969735916 @default.
- W2035207624 cites W1977870139 @default.
- W2035207624 cites W1992823504 @default.
- W2035207624 cites W2002681950 @default.
- W2035207624 cites W2022995836 @default.
- W2035207624 cites W2029457088 @default.
- W2035207624 cites W2047422552 @default.
- W2035207624 cites W2063946694 @default.
- W2035207624 cites W2080449109 @default.
- W2035207624 cites W2087535596 @default.
- W2035207624 cites W2143992133 @default.
- W2035207624 doi "https://doi.org/10.1088/0022-3727/34/18/303" @default.
- W2035207624 hasPublicationYear "2001" @default.
- W2035207624 type Work @default.
- W2035207624 sameAs 2035207624 @default.
- W2035207624 citedByCount "13" @default.
- W2035207624 countsByYear W20352076242012 @default.
- W2035207624 countsByYear W20352076242016 @default.
- W2035207624 countsByYear W20352076242018 @default.
- W2035207624 countsByYear W20352076242023 @default.
- W2035207624 crossrefType "journal-article" @default.
- W2035207624 hasAuthorship W2035207624A5016050548 @default.
- W2035207624 hasAuthorship W2035207624A5018890261 @default.
- W2035207624 hasAuthorship W2035207624A5043594883 @default.
- W2035207624 hasAuthorship W2035207624A5074513421 @default.
- W2035207624 hasAuthorship W2035207624A5078916182 @default.
- W2035207624 hasConcept C119599485 @default.
- W2035207624 hasConcept C120665830 @default.
- W2035207624 hasConcept C121332964 @default.
- W2035207624 hasConcept C127413603 @default.
- W2035207624 hasConcept C127934551 @default.
- W2035207624 hasConcept C165801399 @default.
- W2035207624 hasConcept C17525397 @default.
- W2035207624 hasConcept C180205008 @default.
- W2035207624 hasConcept C188414643 @default.
- W2035207624 hasConcept C192562407 @default.
- W2035207624 hasConcept C21200559 @default.
- W2035207624 hasConcept C24326235 @default.
- W2035207624 hasConcept C24890656 @default.
- W2035207624 hasConcept C30066665 @default.
- W2035207624 hasConcept C49040817 @default.
- W2035207624 hasConcept C62520636 @default.
- W2035207624 hasConcept C74064498 @default.
- W2035207624 hasConcept C81774821 @default.
- W2035207624 hasConcept C82706917 @default.
- W2035207624 hasConceptScore W2035207624C119599485 @default.
- W2035207624 hasConceptScore W2035207624C120665830 @default.
- W2035207624 hasConceptScore W2035207624C121332964 @default.
- W2035207624 hasConceptScore W2035207624C127413603 @default.
- W2035207624 hasConceptScore W2035207624C127934551 @default.
- W2035207624 hasConceptScore W2035207624C165801399 @default.
- W2035207624 hasConceptScore W2035207624C17525397 @default.
- W2035207624 hasConceptScore W2035207624C180205008 @default.
- W2035207624 hasConceptScore W2035207624C188414643 @default.
- W2035207624 hasConceptScore W2035207624C192562407 @default.
- W2035207624 hasConceptScore W2035207624C21200559 @default.
- W2035207624 hasConceptScore W2035207624C24326235 @default.
- W2035207624 hasConceptScore W2035207624C24890656 @default.
- W2035207624 hasConceptScore W2035207624C30066665 @default.
- W2035207624 hasConceptScore W2035207624C49040817 @default.
- W2035207624 hasConceptScore W2035207624C62520636 @default.
- W2035207624 hasConceptScore W2035207624C74064498 @default.
- W2035207624 hasConceptScore W2035207624C81774821 @default.
- W2035207624 hasConceptScore W2035207624C82706917 @default.
- W2035207624 hasIssue "18" @default.
- W2035207624 hasLocation W20352076241 @default.
- W2035207624 hasOpenAccess W2035207624 @default.
- W2035207624 hasPrimaryLocation W20352076241 @default.
- W2035207624 hasRelatedWork W2039696140 @default.
- W2035207624 hasRelatedWork W2076039583 @default.
- W2035207624 hasRelatedWork W2107554811 @default.
- W2035207624 hasRelatedWork W2121143164 @default.
- W2035207624 hasRelatedWork W2493744812 @default.
- W2035207624 hasRelatedWork W3100190553 @default.
- W2035207624 hasRelatedWork W3201442771 @default.
- W2035207624 hasRelatedWork W3215316863 @default.
- W2035207624 hasRelatedWork W4361771699 @default.
- W2035207624 hasRelatedWork W2950832079 @default.
- W2035207624 hasVolume "34" @default.
- W2035207624 isParatext "false" @default.
- W2035207624 isRetracted "false" @default.
- W2035207624 magId "2035207624" @default.
- W2035207624 workType "article" @default.