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- W2035359995 abstract "A Green’s-function method for modeling propagation of surface acoustic waves in anisotropic nanolayered materials is reviewed. The mathematical model, developed at NIST, provides a computationally efficient inversion algorithm for determination of the material parameters of the film, such as its elastic constants and density, from observed dispersion of the surface acoustic waves. The application of the method to a 306 nm thick TiN film having transverse isotropy on a single crystal Si substrate is discussed as an example. The errors in the values of the parameters determined by using the inversion algorithm and the question of uniqueness of the values of the parameters are discussed in detail. It is suggested that, at least in the example considered in this paper, the SAW dispersion can be used to determine any two parameters of the film, provided other parameters are known by independent measurements. In particular, the values of c11 and the density of the film, obtained from the measured SAW dispersion, are the most reliable and the value of c44 is the least reliable. The method is extended to account for defective bonding between the film and the interface and the effect of an intermediate layer of silica between the film and the substrate." @default.
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- W2035359995 date "2004-10-01" @default.
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- W2035359995 title "Green’s-function method for modeling surface acoustic wave dispersion in anisotropic material systems and determination of material parameters" @default.
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- W2035359995 doi "https://doi.org/10.1016/j.wavemoti.2004.02.007" @default.
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