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- W2035366926 abstract "The decreasing geometries and increasing die sizes of today's VLSI circuits are demanding ever more stringent controls over particle contamination on semiconductor wafers during their processing. Consequently, there is a need for objective inspection techniques to monitor defects and contaminants on the surface of semiconductor devices. The goals of such an inspection are:" @default.
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- W2035366926 date "1986-01-02" @default.
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- W2035366926 title "Wafer Inspection with a Laser Scanning Microscope" @default.
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- W2035366926 doi "https://doi.org/10.1002/j.1538-7305.1986.tb00060.x" @default.
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