FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2035386725> ?p ?o ?g. }

• W2035386725 endingPage "S298" @default.
• W2035386725 startingPage "S294" @default.
• W2035386725 abstract "Ion energy spectra of negative oxygen ions in a reactive d.c. magnetron sputtering process were investigated with an energy-dispersive mass spectrometer facing zinc targets. The radial distribution of their flux parallel to the target normal was obtained by shifting the magnetron relative to the mass-spectrometer. A plane and an eroded target were studied in comparison. Both targets exhibit a significant radial inhomogeneity of the ion flux peaking opposite the race-track. The inhomogeneity is particularly pronounced for high-energetic ions but still observed at low energy and is much higher for the plane target. Together with a generally decreased ion flux for the eroded target it is concluded that the distribution of energetic bombardment of the substrate changes distinctly with the erosion of planar magnetron targets. The energy distribution of the low-energetic ions further suggests that they are formed in the pre-sheath of the target." @default.
• W2035386725 created "2016-06-24" @default.
• W2035386725 creator A5003032040 @default.
• W2035386725 creator A5021544846 @default.
• W2035386725 date "2011-07-01" @default.
• W2035386725 modified "2023-10-01" @default.
• W2035386725 title "The influence of the target age on laterally resolved ion distributions in reactive planar magnetron sputtering" @default.
• W2035386725 cites W1965210884 @default.
• W2035386725 cites W1973160719 @default.
• W2035386725 cites W1980899127 @default.
• W2035386725 cites W1983388462 @default.
• W2035386725 cites W1988669945 @default.
• W2035386725 cites W1989637466 @default.
• W2035386725 cites W1994764529 @default.
• W2035386725 cites W2003863904 @default.
• W2035386725 cites W2006233377 @default.
• W2035386725 cites W2008744161 @default.
• W2035386725 cites W2050199135 @default.
• W2035386725 cites W2051515376 @default.
• W2035386725 cites W2062063882 @default.
• W2035386725 cites W2064970876 @default.
• W2035386725 cites W2065138335 @default.
• W2035386725 cites W2076840697 @default.
• W2035386725 cites W2085576277 @default.
• W2035386725 cites W2117608580 @default.
• W2035386725 doi "https://doi.org/10.1016/j.surfcoat.2011.01.050" @default.
• W2035386725 hasPublicationYear "2011" @default.
• W2035386725 type Work @default.
• W2035386725 sameAs 2035386725 @default.
• W2035386725 citedByCount "35" @default.
• W2035386725 countsByYear W20353867252012 @default.
• W2035386725 countsByYear W20353867252013 @default.
• W2035386725 countsByYear W20353867252014 @default.
• W2035386725 countsByYear W20353867252015 @default.
• W2035386725 countsByYear W20353867252016 @default.
• W2035386725 countsByYear W20353867252017 @default.
• W2035386725 countsByYear W20353867252019 @default.
• W2035386725 countsByYear W20353867252020 @default.
• W2035386725 countsByYear W20353867252021 @default.
• W2035386725 countsByYear W20353867252023 @default.
• W2035386725 crossrefType "journal-article" @default.
• W2035386725 hasAuthorship W2035386725A5003032040 @default.
• W2035386725 hasAuthorship W2035386725A5021544846 @default.
• W2035386725 hasConcept C113196181 @default.
• W2035386725 hasConcept C121332964 @default.
• W2035386725 hasConcept C121684516 @default.
• W2035386725 hasConcept C123408415 @default.
• W2035386725 hasConcept C134786449 @default.
• W2035386725 hasConcept C145148216 @default.
• W2035386725 hasConcept C162356407 @default.
• W2035386725 hasConcept C171250308 @default.
• W2035386725 hasConcept C178790620 @default.
• W2035386725 hasConcept C184779094 @default.
• W2035386725 hasConcept C185592680 @default.
• W2035386725 hasConcept C19067145 @default.
• W2035386725 hasConcept C191897082 @default.
• W2035386725 hasConcept C192562407 @default.
• W2035386725 hasConcept C22423302 @default.
• W2035386725 hasConcept C41008148 @default.
• W2035386725 hasConcept C43617362 @default.
• W2035386725 hasConcept C61427134 @default.
• W2035386725 hasConcept C68709404 @default.
• W2035386725 hasConceptScore W2035386725C113196181 @default.
• W2035386725 hasConceptScore W2035386725C121332964 @default.
• W2035386725 hasConceptScore W2035386725C121684516 @default.
• W2035386725 hasConceptScore W2035386725C123408415 @default.
• W2035386725 hasConceptScore W2035386725C134786449 @default.
• W2035386725 hasConceptScore W2035386725C145148216 @default.
• W2035386725 hasConceptScore W2035386725C162356407 @default.
• W2035386725 hasConceptScore W2035386725C171250308 @default.
• W2035386725 hasConceptScore W2035386725C178790620 @default.
• W2035386725 hasConceptScore W2035386725C184779094 @default.
• W2035386725 hasConceptScore W2035386725C185592680 @default.
• W2035386725 hasConceptScore W2035386725C19067145 @default.
• W2035386725 hasConceptScore W2035386725C191897082 @default.
• W2035386725 hasConceptScore W2035386725C192562407 @default.
• W2035386725 hasConceptScore W2035386725C22423302 @default.
• W2035386725 hasConceptScore W2035386725C41008148 @default.
• W2035386725 hasConceptScore W2035386725C43617362 @default.
• W2035386725 hasConceptScore W2035386725C61427134 @default.
• W2035386725 hasConceptScore W2035386725C68709404 @default.
• W2035386725 hasLocation W20353867251 @default.
• W2035386725 hasOpenAccess W2035386725 @default.
• W2035386725 hasPrimaryLocation W20353867251 @default.
• W2035386725 hasRelatedWork W169277544 @default.
• W2035386725 hasRelatedWork W2003534256 @default.
• W2035386725 hasRelatedWork W2009773180 @default.
• W2035386725 hasRelatedWork W2024763544 @default.
• W2035386725 hasRelatedWork W2026642978 @default.
• W2035386725 hasRelatedWork W2040589620 @default.
• W2035386725 hasRelatedWork W2058503972 @default.
• W2035386725 hasRelatedWork W2352169247 @default.
• W2035386725 hasRelatedWork W2366084376 @default.
• W2035386725 hasRelatedWork W1953198208 @default.
• W2035386725 hasVolume "205" @default.
• W2035386725 isParatext "false" @default.
• W2035386725 isRetracted "false" @default.
• W2035386725 magId "2035386725" @default.

• next