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- W2035495521 abstract "Recently, FIB-Sputtering process has been applied to many micro-manufacturing fields such as semi-conductor industries, display industries and IT industries etc. because it is available to fabricate the micro 3D shape structure directly and more effectively than other machining processes. However, currently FIB is not applied in the fabrication of this micro mold because of some problems such as redeposition and charging effect relating to shape accuracy and productivity. Furthermore, the prediction of the material removal rate is difficult for micro structure fabrication. In this paper, we studied the FIB-Sputtering rate according to mold materials. As well, surface roughness characteristics were analyzed for micro and nano mold fabrication. Si wafer, G.C (glassy carbon), STAVAX, and DLC that have been normally considered as good micro or nano mold materials were used in this study. And also we have known the pattern by pattern procedure has more good fib-sputtering shape than layer by layer procedure." @default.
- W2035495521 created "2016-06-24" @default.
- W2035495521 creator A5014242696 @default.
- W2035495521 creator A5032732825 @default.
- W2035495521 creator A5043105828 @default.
- W2035495521 creator A5069464839 @default.
- W2035495521 creator A5081331418 @default.
- W2035495521 date "2008-04-01" @default.
- W2035495521 modified "2023-09-27" @default.
- W2035495521 title "FIB-Sputtering Characteristic of Mold Material and Nano Grid Pattern Fabrication" @default.
- W2035495521 cites W1972382058 @default.
- W2035495521 cites W1975679027 @default.
- W2035495521 cites W1976542785 @default.
- W2035495521 cites W2003734098 @default.
- W2035495521 cites W2017190519 @default.
- W2035495521 cites W2091932226 @default.
- W2035495521 doi "https://doi.org/10.1109/icsma.2008.4505599" @default.
- W2035495521 hasPublicationYear "2008" @default.
- W2035495521 type Work @default.
- W2035495521 sameAs 2035495521 @default.
- W2035495521 citedByCount "0" @default.
- W2035495521 crossrefType "proceedings-article" @default.
- W2035495521 hasAuthorship W2035495521A5014242696 @default.
- W2035495521 hasAuthorship W2035495521A5032732825 @default.
- W2035495521 hasAuthorship W2035495521A5043105828 @default.
- W2035495521 hasAuthorship W2035495521A5069464839 @default.
- W2035495521 hasAuthorship W2035495521A5081331418 @default.
- W2035495521 hasConcept C107365816 @default.
- W2035495521 hasConcept C136525101 @default.
- W2035495521 hasConcept C142724271 @default.
- W2035495521 hasConcept C159985019 @default.
- W2035495521 hasConcept C160671074 @default.
- W2035495521 hasConcept C171250308 @default.
- W2035495521 hasConcept C19067145 @default.
- W2035495521 hasConcept C191897082 @default.
- W2035495521 hasConcept C192562407 @default.
- W2035495521 hasConcept C204787440 @default.
- W2035495521 hasConcept C22423302 @default.
- W2035495521 hasConcept C2779227376 @default.
- W2035495521 hasConcept C2780357685 @default.
- W2035495521 hasConcept C2780566776 @default.
- W2035495521 hasConcept C523214423 @default.
- W2035495521 hasConcept C71924100 @default.
- W2035495521 hasConceptScore W2035495521C107365816 @default.
- W2035495521 hasConceptScore W2035495521C136525101 @default.
- W2035495521 hasConceptScore W2035495521C142724271 @default.
- W2035495521 hasConceptScore W2035495521C159985019 @default.
- W2035495521 hasConceptScore W2035495521C160671074 @default.
- W2035495521 hasConceptScore W2035495521C171250308 @default.
- W2035495521 hasConceptScore W2035495521C19067145 @default.
- W2035495521 hasConceptScore W2035495521C191897082 @default.
- W2035495521 hasConceptScore W2035495521C192562407 @default.
- W2035495521 hasConceptScore W2035495521C204787440 @default.
- W2035495521 hasConceptScore W2035495521C22423302 @default.
- W2035495521 hasConceptScore W2035495521C2779227376 @default.
- W2035495521 hasConceptScore W2035495521C2780357685 @default.
- W2035495521 hasConceptScore W2035495521C2780566776 @default.
- W2035495521 hasConceptScore W2035495521C523214423 @default.
- W2035495521 hasConceptScore W2035495521C71924100 @default.
- W2035495521 hasLocation W20354955211 @default.
- W2035495521 hasOpenAccess W2035495521 @default.
- W2035495521 hasPrimaryLocation W20354955211 @default.
- W2035495521 hasRelatedWork W1986064198 @default.
- W2035495521 hasRelatedWork W2013263542 @default.
- W2035495521 hasRelatedWork W2038729374 @default.
- W2035495521 hasRelatedWork W2101533454 @default.
- W2035495521 hasRelatedWork W2591757658 @default.
- W2035495521 hasRelatedWork W2596721096 @default.
- W2035495521 hasRelatedWork W2766879480 @default.
- W2035495521 hasRelatedWork W3185774322 @default.
- W2035495521 hasRelatedWork W3209632788 @default.
- W2035495521 hasRelatedWork W4285802202 @default.
- W2035495521 isParatext "false" @default.
- W2035495521 isRetracted "false" @default.
- W2035495521 magId "2035495521" @default.
- W2035495521 workType "article" @default.