Matches in SemOpenAlex for { <https://semopenalex.org/work/W2035557680> ?p ?o ?g. }
Showing items 1 to 95 of
95
with 100 items per page.
- W2035557680 endingPage "3175" @default.
- W2035557680 startingPage "3169" @default.
- W2035557680 abstract "Abstract A simple theoretical analysis for curvature evolution in unpassivated and passivated copper interconnect lines on a silicon substrate is proposed. A layer consisting of copper and oxide lines is modeled as a homogenized composite that has different elastic moduli and thermal expansion coefficients in two different directions, i.e. along and across the lines, due to the anisotropic line geometry. These effective thermoelastic properties of the composite layer are approximated in terms of volume fractions and thermoelastic properties of each line using standard composite theory. This analogy facilitates the calculation of curvature changes in Damascene-processed copper lines subjected to chemical–mechanical polishing and/or thermal cycling. The effects of line height, width and spacing on curvature evolution along and across the lines are readily extracted from the analysis. In addition, this theory is easily extended to passivated copper lines irrespective of passivation materials by superimposing the curvature change resulting from an additional layer. Finite element analysis has been used to assess the validity of the theoretical predictions; such comparisons show that the simple theory provides a reasonable match with numerical simulations of curvature evolution during the Damascene process in copper interconnects for a wide range of line and passivation geometry of practical interest." @default.
- W2035557680 created "2016-06-24" @default.
- W2035557680 creator A5019181095 @default.
- W2035557680 creator A5035492327 @default.
- W2035557680 date "2000-07-01" @default.
- W2035557680 modified "2023-09-23" @default.
- W2035557680 title "Effects of line and passivation geometry on curvature evolution during processing and thermal cycling in copper interconnect lines" @default.
- W2035557680 cites W1963690363 @default.
- W2035557680 cites W1967984958 @default.
- W2035557680 cites W1969941504 @default.
- W2035557680 cites W1983495990 @default.
- W2035557680 cites W1986359186 @default.
- W2035557680 cites W2038611566 @default.
- W2035557680 cites W2046896054 @default.
- W2035557680 cites W2047020565 @default.
- W2035557680 cites W2066395754 @default.
- W2035557680 cites W2073894020 @default.
- W2035557680 cites W2081290473 @default.
- W2035557680 cites W2081786181 @default.
- W2035557680 doi "https://doi.org/10.1016/s1359-6454(00)00114-2" @default.
- W2035557680 hasPublicationYear "2000" @default.
- W2035557680 type Work @default.
- W2035557680 sameAs 2035557680 @default.
- W2035557680 citedByCount "43" @default.
- W2035557680 countsByYear W20355576802012 @default.
- W2035557680 countsByYear W20355576802013 @default.
- W2035557680 countsByYear W20355576802015 @default.
- W2035557680 countsByYear W20355576802016 @default.
- W2035557680 countsByYear W20355576802017 @default.
- W2035557680 countsByYear W20355576802018 @default.
- W2035557680 countsByYear W20355576802023 @default.
- W2035557680 crossrefType "journal-article" @default.
- W2035557680 hasAuthorship W2035557680A5019181095 @default.
- W2035557680 hasAuthorship W2035557680A5035492327 @default.
- W2035557680 hasConcept C121332964 @default.
- W2035557680 hasConcept C123745756 @default.
- W2035557680 hasConcept C159985019 @default.
- W2035557680 hasConcept C166957645 @default.
- W2035557680 hasConcept C177564732 @default.
- W2035557680 hasConcept C191897082 @default.
- W2035557680 hasConcept C192562407 @default.
- W2035557680 hasConcept C195065555 @default.
- W2035557680 hasConcept C198352243 @default.
- W2035557680 hasConcept C204530211 @default.
- W2035557680 hasConcept C2524010 @default.
- W2035557680 hasConcept C2779227376 @default.
- W2035557680 hasConcept C31258907 @default.
- W2035557680 hasConcept C33574316 @default.
- W2035557680 hasConcept C33923547 @default.
- W2035557680 hasConcept C41008148 @default.
- W2035557680 hasConcept C541528975 @default.
- W2035557680 hasConcept C544778455 @default.
- W2035557680 hasConcept C95457728 @default.
- W2035557680 hasConcept C97355855 @default.
- W2035557680 hasConceptScore W2035557680C121332964 @default.
- W2035557680 hasConceptScore W2035557680C123745756 @default.
- W2035557680 hasConceptScore W2035557680C159985019 @default.
- W2035557680 hasConceptScore W2035557680C166957645 @default.
- W2035557680 hasConceptScore W2035557680C177564732 @default.
- W2035557680 hasConceptScore W2035557680C191897082 @default.
- W2035557680 hasConceptScore W2035557680C192562407 @default.
- W2035557680 hasConceptScore W2035557680C195065555 @default.
- W2035557680 hasConceptScore W2035557680C198352243 @default.
- W2035557680 hasConceptScore W2035557680C204530211 @default.
- W2035557680 hasConceptScore W2035557680C2524010 @default.
- W2035557680 hasConceptScore W2035557680C2779227376 @default.
- W2035557680 hasConceptScore W2035557680C31258907 @default.
- W2035557680 hasConceptScore W2035557680C33574316 @default.
- W2035557680 hasConceptScore W2035557680C33923547 @default.
- W2035557680 hasConceptScore W2035557680C41008148 @default.
- W2035557680 hasConceptScore W2035557680C541528975 @default.
- W2035557680 hasConceptScore W2035557680C544778455 @default.
- W2035557680 hasConceptScore W2035557680C95457728 @default.
- W2035557680 hasConceptScore W2035557680C97355855 @default.
- W2035557680 hasIssue "12" @default.
- W2035557680 hasLocation W20355576801 @default.
- W2035557680 hasOpenAccess W2035557680 @default.
- W2035557680 hasPrimaryLocation W20355576801 @default.
- W2035557680 hasRelatedWork W175153853 @default.
- W2035557680 hasRelatedWork W2010414321 @default.
- W2035557680 hasRelatedWork W2077789538 @default.
- W2035557680 hasRelatedWork W2121529895 @default.
- W2035557680 hasRelatedWork W2362344113 @default.
- W2035557680 hasRelatedWork W2740177935 @default.
- W2035557680 hasRelatedWork W2807417504 @default.
- W2035557680 hasRelatedWork W3108601424 @default.
- W2035557680 hasRelatedWork W3158963911 @default.
- W2035557680 hasRelatedWork W4205598575 @default.
- W2035557680 hasVolume "48" @default.
- W2035557680 isParatext "false" @default.
- W2035557680 isRetracted "false" @default.
- W2035557680 magId "2035557680" @default.
- W2035557680 workType "article" @default.