Matches in SemOpenAlex for { <https://semopenalex.org/work/W2035575968> ?p ?o ?g. }
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91
with 100 items per page.
- W2035575968 endingPage "126" @default.
- W2035575968 startingPage "121" @default.
- W2035575968 abstract "The scanning tunneling microscope (STM) is known for its high lateral resolution. The unreliability of the scanning and positioning motion of the STM were monitored by interferometer and capacitance recently. The widely used conventional lead zirconium titanate (PZT) tube scanner has good mechanical properties; however, the motion of the tube includes angular motion which generates large error. Even with an optical interferometer to calibrate STM tip motion, the angular motion reduces or eliminates the visibility of interference. We have developed an eight-segmented tube scanner which reduces angular motion for maintaining the visibility of interference and reduces Abbe error. The residual error of the value measured by a high-accuracy interferometer which measured the motion of the newly developed eight-segmented tube scanner was estimated by measuring a standard pattern. The accuracy of the interferometer, which used a balanced detection technique, the principle of which is also reported in this paper, was measured by a capacitance gauge." @default.
- W2035575968 created "2016-06-24" @default.
- W2035575968 creator A5001028540 @default.
- W2035575968 creator A5004081743 @default.
- W2035575968 creator A5021766296 @default.
- W2035575968 creator A5030669509 @default.
- W2035575968 creator A5031082466 @default.
- W2035575968 creator A5064736433 @default.
- W2035575968 date "1995-10-01" @default.
- W2035575968 modified "2023-09-27" @default.
- W2035575968 title "Three-dimensional displacement measurement of a tube scanner for a scanning tunneling microscope by optical interferometer" @default.
- W2035575968 cites W1964621445 @default.
- W2035575968 cites W1978639606 @default.
- W2035575968 cites W1979815857 @default.
- W2035575968 cites W1996818899 @default.
- W2035575968 cites W1999500561 @default.
- W2035575968 cites W2009034158 @default.
- W2035575968 cites W2016059623 @default.
- W2035575968 cites W2052067983 @default.
- W2035575968 cites W2061276223 @default.
- W2035575968 cites W2071982434 @default.
- W2035575968 cites W2092535810 @default.
- W2035575968 cites W2110167104 @default.
- W2035575968 cites W2144172558 @default.
- W2035575968 cites W3150248096 @default.
- W2035575968 doi "https://doi.org/10.1088/0957-4484/6/4/003" @default.
- W2035575968 hasPublicationYear "1995" @default.
- W2035575968 type Work @default.
- W2035575968 sameAs 2035575968 @default.
- W2035575968 citedByCount "10" @default.
- W2035575968 countsByYear W20355759682012 @default.
- W2035575968 countsByYear W20355759682014 @default.
- W2035575968 countsByYear W20355759682022 @default.
- W2035575968 crossrefType "journal-article" @default.
- W2035575968 hasAuthorship W2035575968A5001028540 @default.
- W2035575968 hasAuthorship W2035575968A5004081743 @default.
- W2035575968 hasAuthorship W2035575968A5021766296 @default.
- W2035575968 hasAuthorship W2035575968A5030669509 @default.
- W2035575968 hasAuthorship W2035575968A5031082466 @default.
- W2035575968 hasAuthorship W2035575968A5064736433 @default.
- W2035575968 hasConcept C107551265 @default.
- W2035575968 hasConcept C120665830 @default.
- W2035575968 hasConcept C121332964 @default.
- W2035575968 hasConcept C15744967 @default.
- W2035575968 hasConcept C159985019 @default.
- W2035575968 hasConcept C166689943 @default.
- W2035575968 hasConcept C171250308 @default.
- W2035575968 hasConcept C192562407 @default.
- W2035575968 hasConcept C26771246 @default.
- W2035575968 hasConcept C2777551473 @default.
- W2035575968 hasConcept C2779751349 @default.
- W2035575968 hasConcept C542102704 @default.
- W2035575968 hasConcept C6518042 @default.
- W2035575968 hasConcept C67649825 @default.
- W2035575968 hasConcept C77017923 @default.
- W2035575968 hasConceptScore W2035575968C107551265 @default.
- W2035575968 hasConceptScore W2035575968C120665830 @default.
- W2035575968 hasConceptScore W2035575968C121332964 @default.
- W2035575968 hasConceptScore W2035575968C15744967 @default.
- W2035575968 hasConceptScore W2035575968C159985019 @default.
- W2035575968 hasConceptScore W2035575968C166689943 @default.
- W2035575968 hasConceptScore W2035575968C171250308 @default.
- W2035575968 hasConceptScore W2035575968C192562407 @default.
- W2035575968 hasConceptScore W2035575968C26771246 @default.
- W2035575968 hasConceptScore W2035575968C2777551473 @default.
- W2035575968 hasConceptScore W2035575968C2779751349 @default.
- W2035575968 hasConceptScore W2035575968C542102704 @default.
- W2035575968 hasConceptScore W2035575968C6518042 @default.
- W2035575968 hasConceptScore W2035575968C67649825 @default.
- W2035575968 hasConceptScore W2035575968C77017923 @default.
- W2035575968 hasIssue "4" @default.
- W2035575968 hasLocation W20355759681 @default.
- W2035575968 hasOpenAccess W2035575968 @default.
- W2035575968 hasPrimaryLocation W20355759681 @default.
- W2035575968 hasRelatedWork W1833571962 @default.
- W2035575968 hasRelatedWork W1997912556 @default.
- W2035575968 hasRelatedWork W2013536020 @default.
- W2035575968 hasRelatedWork W2035575968 @default.
- W2035575968 hasRelatedWork W2051133509 @default.
- W2035575968 hasRelatedWork W2073426596 @default.
- W2035575968 hasRelatedWork W2079051531 @default.
- W2035575968 hasRelatedWork W2119402633 @default.
- W2035575968 hasRelatedWork W2403466521 @default.
- W2035575968 hasRelatedWork W4311274670 @default.
- W2035575968 hasVolume "6" @default.
- W2035575968 isParatext "false" @default.
- W2035575968 isRetracted "false" @default.
- W2035575968 magId "2035575968" @default.
- W2035575968 workType "article" @default.