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- W2035648670 abstract "The consequences of thermal treatments in nitric oxide atmospheres on the characteristics of dielectric films / SiC structures was investigated by high-frequency capacitance-voltage measurements, X-ray photoelectron spectroscopy, and X-ray reflectometry techniques. It was observed that nitrogen incorporation in dielectric films / SiC structures leads to the formation of a thinner interfacial layer that contains carbon. This fact was related to the improvement of electrical properties of those structures." @default.
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- W2035648670 date "2010-04-01" @default.
- W2035648670 modified "2023-10-16" @default.
- W2035648670 title "Consequences of NO Thermal Treatments in the Properties of Dielectric Films / SiC Structures" @default.
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- W2035648670 doi "https://doi.org/10.4028/www.scientific.net/msf.645-648.689" @default.
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