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• W2035651372 abstract "Abstract This paper describes the electrical and piezoresistive properties of thin SOI (Si-on-insulator) films and their applications to pressure transducers. The SOI structures of Si/SiO 2 /Si and Si/Al 2 O 3 /Si used in this work are formed by SDB (Si-wafer direct bonding) technology and heteroepitaxial growth, respectively. The electrical and piezoresistive properties of thin SOI films prepared by SDB technology are the same as those of bulk Si and the films will be possible to handle as their crystalline quality is comparable to that of bulk Si. On the other hand, the electrical characteristics of epitaxially stacked thin SOI films are similar to those obtained from SOS (silicon-on-sapphire) and the piezoresistive characteristics correspond to 80–90% of those of bulk Si for a carrier concentration range 3 × 10 18 −1 × 10 20 cm −3 . The pressure sensitivity variation of the pressure transducers using the insulator of an SOI structure as an etch-stop layer during thin Si membrane formation can be controlled to within a standard deviation of 2.3% over 200 devices. In the case of pressure transducers using the insulator of an SOI structure as the dielectric isolation layer of piezoresistors, the implemented pressure transducers can be operated at higher temperatures up to 300 °C. Moreover, the pressure transducers fabricated on double SOI (Si/Al 2 O 3 /Si/SiO 2 /Si) structures formed by combining SDB technology with epitaxial growth also show excellent characteristics with high-temperature operation and high performance, eliminating completely the inherent drawbacks of a piezoresistive pressure transducer. From these results, the SOI structure should be a significant step in the development of the high-performance and low-cost pressure transducers needed for a wide variety of pressure-sensing applications." @default.
• W2035651372 created "2016-06-24" @default.
• W2035651372 creator A5028577029 @default.
• W2035651372 date "1993-12-01" @default.
• W2035651372 modified "2023-10-02" @default.
• W2035651372 title "Thin SOI structures for sensing and integrated circuit applications" @default.
• W2035651372 cites W1895390294 @default.
• W2035651372 cites W1966551318 @default.
• W2035651372 cites W1974978401 @default.
• W2035651372 cites W1977796964 @default.
• W2035651372 cites W1981156881 @default.
• W2035651372 cites W1995409867 @default.
• W2035651372 cites W2006280544 @default.
• W2035651372 cites W2006465965 @default.
• W2035651372 cites W2006751949 @default.
• W2035651372 cites W2008045197 @default.
• W2035651372 cites W2008520220 @default.
• W2035651372 cites W2011098151 @default.
• W2035651372 cites W2011271508 @default.
• W2035651372 cites W2016733656 @default.
• W2035651372 cites W2017034728 @default.
• W2035651372 cites W2020595033 @default.
• W2035651372 cites W2021092478 @default.
• W2035651372 cites W2023860936 @default.
• W2035651372 cites W2027670136 @default.
• W2035651372 cites W2031538632 @default.
• W2035651372 cites W2035484224 @default.
• W2035651372 cites W2039978858 @default.
• W2035651372 cites W2041911697 @default.
• W2035651372 cites W2042729174 @default.
• W2035651372 cites W2047173029 @default.
• W2035651372 cites W2048392237 @default.
• W2035651372 cites W2051197680 @default.
• W2035651372 cites W2060342852 @default.
• W2035651372 cites W2060739983 @default.
• W2035651372 cites W2062978950 @default.
• W2035651372 cites W2064124228 @default.
• W2035651372 cites W2069655806 @default.
• W2035651372 cites W2071767044 @default.
• W2035651372 cites W2079230125 @default.
• W2035651372 cites W2086942685 @default.
• W2035651372 cites W2087253963 @default.
• W2035651372 cites W2093605517 @default.
• W2035651372 cites W2105067244 @default.
• W2035651372 cites W2109267612 @default.
• W2035651372 cites W2120255193 @default.
• W2035651372 cites W2134160127 @default.
• W2035651372 cites W2134583636 @default.
• W2035651372 cites W2136107129 @default.
• W2035651372 cites W2143673086 @default.
• W2035651372 cites W2159817220 @default.
• W2035651372 cites W2165342977 @default.
• W2035651372 cites W2168306017 @default.
• W2035651372 cites W2462406435 @default.
• W2035651372 doi "https://doi.org/10.1016/0924-4247(93)80226-7" @default.
• W2035651372 hasPublicationYear "1993" @default.
• W2035651372 type Work @default.
• W2035651372 sameAs 2035651372 @default.
• W2035651372 citedByCount "18" @default.
• W2035651372 countsByYear W20356513722014 @default.
• W2035651372 countsByYear W20356513722018 @default.
• W2035651372 countsByYear W20356513722023 @default.
• W2035651372 crossrefType "journal-article" @default.
• W2035651372 hasAuthorship W2035651372A5028577029 @default.
• W2035651372 hasConcept C110738630 @default.
• W2035651372 hasConcept C119599485 @default.
• W2035651372 hasConcept C120665830 @default.
• W2035651372 hasConcept C121332964 @default.
• W2035651372 hasConcept C127413603 @default.
• W2035651372 hasConcept C133386390 @default.
• W2035651372 hasConcept C160671074 @default.
• W2035651372 hasConcept C171250308 @default.
• W2035651372 hasConcept C19067145 @default.
• W2035651372 hasConcept C192562407 @default.
• W2035651372 hasConcept C198490522 @default.
• W2035651372 hasConcept C2779227376 @default.
• W2035651372 hasConcept C2780064504 @default.
• W2035651372 hasConcept C41325743 @default.
• W2035651372 hasConcept C49040817 @default.
• W2035651372 hasConcept C520434653 @default.
• W2035651372 hasConcept C53143962 @default.
• W2035651372 hasConcept C544956773 @default.
• W2035651372 hasConcept C56318395 @default.
• W2035651372 hasConcept C97355855 @default.
• W2035651372 hasConceptScore W2035651372C110738630 @default.
• W2035651372 hasConceptScore W2035651372C119599485 @default.
• W2035651372 hasConceptScore W2035651372C120665830 @default.
• W2035651372 hasConceptScore W2035651372C121332964 @default.
• W2035651372 hasConceptScore W2035651372C127413603 @default.
• W2035651372 hasConceptScore W2035651372C133386390 @default.
• W2035651372 hasConceptScore W2035651372C160671074 @default.
• W2035651372 hasConceptScore W2035651372C171250308 @default.
• W2035651372 hasConceptScore W2035651372C19067145 @default.
• W2035651372 hasConceptScore W2035651372C192562407 @default.
• W2035651372 hasConceptScore W2035651372C198490522 @default.
• W2035651372 hasConceptScore W2035651372C2779227376 @default.
• W2035651372 hasConceptScore W2035651372C2780064504 @default.
• W2035651372 hasConceptScore W2035651372C41325743 @default.
• W2035651372 hasConceptScore W2035651372C49040817 @default.
• W2035651372 hasConceptScore W2035651372C520434653 @default.

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