FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2035704191> ?p ?o ?g. }

• W2035704191 endingPage "084014" @default.
• W2035704191 startingPage "084014" @default.
• W2035704191 abstract "Alumina (Al2O3) films deposited through atomic layer deposition (ALD) are known to be effective permeation barriers due to their uniformity and pinhole-free morphology. However, they suffer from process-induced defects that inhibit their stability in aqueous and hygroscopic environments. We explore the water stability of ALD deposited alumina barrier films capped with nickel oxide (NiOx) and titanium oxide (TiOx) thin films deposited through e-beam or ALD deposition. The performance of the barriers was evaluated by measuring their ability to protect zinc oxide (ZnO) thin film sensors immersed in deionized (DI) water. X-ray photoelectron spectroscopy (XPS) was used to determine the composition of the barrier films with the various capping layers. The characteristic photoluminescence (PL) peak for the ZnO sensor was used as a marker to study changes in peak intensity due to degradation of the barrier films as a function of water immersion time. The TiOx capped films showed remarkable stability when immersed in DI water for 10 days. These results show that TiOx capping layers can offer superior protection to mitigate the water degradation of ALD alumina barrier films. Such composite laminates will enable a wider range of applications for ALD deposited alumina barrier films including aqueous environments." @default.
• W2035704191 created "2016-06-24" @default.
• W2035704191 creator A5039403990 @default.
• W2035704191 creator A5043601003 @default.
• W2035704191 creator A5050932273 @default.
• W2035704191 creator A5090167841 @default.
• W2035704191 date "2013-02-01" @default.
• W2035704191 modified "2023-09-23" @default.
• W2035704191 title "Improving the stability of atomic layer deposited alumina films in aqueous environments with metal oxide capping layers" @default.
• W2035704191 cites W1665344004 @default.
• W2035704191 cites W1964786252 @default.
• W2035704191 cites W1968326438 @default.
• W2035704191 cites W1971362453 @default.
• W2035704191 cites W1975128720 @default.
• W2035704191 cites W1981032730 @default.
• W2035704191 cites W1986648742 @default.
• W2035704191 cites W1993118319 @default.
• W2035704191 cites W1995326391 @default.
• W2035704191 cites W1995726278 @default.
• W2035704191 cites W1997904336 @default.
• W2035704191 cites W1998534931 @default.
• W2035704191 cites W2003945084 @default.
• W2035704191 cites W2013646822 @default.
• W2035704191 cites W2013901062 @default.
• W2035704191 cites W2014129121 @default.
• W2035704191 cites W2018326691 @default.
• W2035704191 cites W2030304534 @default.
• W2035704191 cites W2042445350 @default.
• W2035704191 cites W2043781775 @default.
• W2035704191 cites W2052907493 @default.
• W2035704191 cites W2053370222 @default.
• W2035704191 cites W2057050977 @default.
• W2035704191 cites W2069301103 @default.
• W2035704191 cites W2069857707 @default.
• W2035704191 cites W2074358422 @default.
• W2035704191 cites W2075115794 @default.
• W2035704191 cites W2081258488 @default.
• W2035704191 cites W2083132921 @default.
• W2035704191 cites W2086953072 @default.
• W2035704191 cites W2089446744 @default.
• W2035704191 cites W2091249340 @default.
• W2035704191 cites W2091970602 @default.
• W2035704191 cites W2096500642 @default.
• W2035704191 cites W2105574656 @default.
• W2035704191 cites W2108953022 @default.
• W2035704191 cites W2113406879 @default.
• W2035704191 cites W2125830364 @default.
• W2035704191 cites W2154322410 @default.
• W2035704191 cites W2166449773 @default.
• W2035704191 cites W3047193758 @default.
• W2035704191 doi "https://doi.org/10.1088/0022-3727/46/8/084014" @default.
• W2035704191 hasPublicationYear "2013" @default.
• W2035704191 type Work @default.
• W2035704191 sameAs 2035704191 @default.
• W2035704191 citedByCount "41" @default.
• W2035704191 countsByYear W20357041912013 @default.
• W2035704191 countsByYear W20357041912014 @default.
• W2035704191 countsByYear W20357041912015 @default.
• W2035704191 countsByYear W20357041912016 @default.
• W2035704191 countsByYear W20357041912017 @default.
• W2035704191 countsByYear W20357041912018 @default.
• W2035704191 countsByYear W20357041912019 @default.
• W2035704191 countsByYear W20357041912020 @default.
• W2035704191 countsByYear W20357041912021 @default.
• W2035704191 countsByYear W20357041912022 @default.
• W2035704191 countsByYear W20357041912023 @default.
• W2035704191 crossrefType "journal-article" @default.
• W2035704191 hasAuthorship W2035704191A5039403990 @default.
• W2035704191 hasAuthorship W2035704191A5043601003 @default.
• W2035704191 hasAuthorship W2035704191A5050932273 @default.
• W2035704191 hasAuthorship W2035704191A5090167841 @default.
• W2035704191 hasConcept C127413603 @default.
• W2035704191 hasConcept C147789679 @default.
• W2035704191 hasConcept C171250308 @default.
• W2035704191 hasConcept C184651966 @default.
• W2035704191 hasConcept C185592680 @default.
• W2035704191 hasConcept C191897082 @default.
• W2035704191 hasConcept C192562407 @default.
• W2035704191 hasConcept C2779227376 @default.
• W2035704191 hasConcept C2779851234 @default.
• W2035704191 hasConcept C42360764 @default.
• W2035704191 hasConcept C544153396 @default.
• W2035704191 hasConcept C69544855 @default.
• W2035704191 hasConceptScore W2035704191C127413603 @default.
• W2035704191 hasConceptScore W2035704191C147789679 @default.
• W2035704191 hasConceptScore W2035704191C171250308 @default.
• W2035704191 hasConceptScore W2035704191C184651966 @default.
• W2035704191 hasConceptScore W2035704191C185592680 @default.
• W2035704191 hasConceptScore W2035704191C191897082 @default.
• W2035704191 hasConceptScore W2035704191C192562407 @default.
• W2035704191 hasConceptScore W2035704191C2779227376 @default.
• W2035704191 hasConceptScore W2035704191C2779851234 @default.
• W2035704191 hasConceptScore W2035704191C42360764 @default.
• W2035704191 hasConceptScore W2035704191C544153396 @default.
• W2035704191 hasConceptScore W2035704191C69544855 @default.
• W2035704191 hasIssue "8" @default.
• W2035704191 hasLocation W20357041911 @default.
• W2035704191 hasOpenAccess W2035704191 @default.

• next