Matches in SemOpenAlex for { <https://semopenalex.org/work/W2035741695> ?p ?o ?g. }
Showing items 1 to 62 of
62
with 100 items per page.
- W2035741695 abstract "Abstract Use of a warm water soak midway during development results in improved resist profiles, particularly as a function of focus. Three positive resists are examined in order to qualitatively determine their particular time temperature response to such a process. We find that the expected trade off between temperature and time holds, furthermore there is no need to spin dry wafers during treatment. Control of the time and temperature gives rise to improved profiles relative to samples utilising interrupted development. The warm water IDB also requires lower overheads in development time, as well as being applicable to a wider range of Novolac/DNQ chemistries. The use of multiple warm water IDB treatments may be required in extending the focus latitude of both lines and contacts printed over topography." @default.
- W2035741695 created "2016-06-24" @default.
- W2035741695 creator A5001368173 @default.
- W2035741695 creator A5020030793 @default.
- W2035741695 creator A5057759792 @default.
- W2035741695 creator A5058633552 @default.
- W2035741695 creator A5068204985 @default.
- W2035741695 date "1991-03-01" @default.
- W2035741695 modified "2023-09-26" @default.
- W2035741695 title "Time temperature and other process variables in the warm water Intermediate Development Bake" @default.
- W2035741695 cites W2001714144 @default.
- W2035741695 cites W2042600320 @default.
- W2035741695 doi "https://doi.org/10.1016/0167-9317(91)90053-g" @default.
- W2035741695 hasPublicationYear "1991" @default.
- W2035741695 type Work @default.
- W2035741695 sameAs 2035741695 @default.
- W2035741695 citedByCount "3" @default.
- W2035741695 crossrefType "journal-article" @default.
- W2035741695 hasAuthorship W2035741695A5001368173 @default.
- W2035741695 hasAuthorship W2035741695A5020030793 @default.
- W2035741695 hasAuthorship W2035741695A5057759792 @default.
- W2035741695 hasAuthorship W2035741695A5058633552 @default.
- W2035741695 hasAuthorship W2035741695A5068204985 @default.
- W2035741695 hasConcept C120665830 @default.
- W2035741695 hasConcept C121332964 @default.
- W2035741695 hasConcept C122523270 @default.
- W2035741695 hasConcept C127313418 @default.
- W2035741695 hasConcept C13280743 @default.
- W2035741695 hasConcept C160671074 @default.
- W2035741695 hasConcept C171250308 @default.
- W2035741695 hasConcept C192209626 @default.
- W2035741695 hasConcept C192562407 @default.
- W2035741695 hasConcept C2779227376 @default.
- W2035741695 hasConcept C39353612 @default.
- W2035741695 hasConcept C39432304 @default.
- W2035741695 hasConcept C41008148 @default.
- W2035741695 hasConcept C53524968 @default.
- W2035741695 hasConcept C536315585 @default.
- W2035741695 hasConcept C97355855 @default.
- W2035741695 hasConceptScore W2035741695C120665830 @default.
- W2035741695 hasConceptScore W2035741695C121332964 @default.
- W2035741695 hasConceptScore W2035741695C122523270 @default.
- W2035741695 hasConceptScore W2035741695C127313418 @default.
- W2035741695 hasConceptScore W2035741695C13280743 @default.
- W2035741695 hasConceptScore W2035741695C160671074 @default.
- W2035741695 hasConceptScore W2035741695C171250308 @default.
- W2035741695 hasConceptScore W2035741695C192209626 @default.
- W2035741695 hasConceptScore W2035741695C192562407 @default.
- W2035741695 hasConceptScore W2035741695C2779227376 @default.
- W2035741695 hasConceptScore W2035741695C39353612 @default.
- W2035741695 hasConceptScore W2035741695C39432304 @default.
- W2035741695 hasConceptScore W2035741695C41008148 @default.
- W2035741695 hasConceptScore W2035741695C53524968 @default.
- W2035741695 hasConceptScore W2035741695C536315585 @default.
- W2035741695 hasConceptScore W2035741695C97355855 @default.
- W2035741695 hasLocation W20357416951 @default.
- W2035741695 hasOpenAccess W2035741695 @default.
- W2035741695 hasPrimaryLocation W20357416951 @default.
- W2035741695 isParatext "false" @default.
- W2035741695 isRetracted "false" @default.
- W2035741695 magId "2035741695" @default.
- W2035741695 workType "article" @default.