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- W2035746692 abstract "This work is devoted to the development of technology processes with the aim of realizing a phase modulator based on organic materials. At first, a semiconductor technology is adapted to polymers to elaborate waveguides, and to realize the stacking of layers of passive and active polymers compatible with processes on a silicon substrate. By using the reactive ion-beam etching process, we obtained waveguides with good vertical walls and propagation losses of around 0.5 dB cm−1. For realization of the ‘whole-polymer’ phase modulator, as a guiding layer we used the fluorinated polyimide, 6FDA/MPDA (Figure 1), mixed with a colorant, Disperse Red One (DR1); this layer is sandwiched between two organic layers with lower indices. The lower cladding layer was realized with the 6FDA/MPDA polyimide, and the upper cladding layer with poly(methyl methacrylate) (PMMA) deposited on a thin anhydride-(6 FDA) and diamine-(ODA) based polyimide layer obtained by vapor deposition polymerization (VDP): this layer leads to a good adherence between the active layers, while the PMMA layer can also be covered with 6FDA/ODA which then acts as a protective layer. With an infrared camera, we have shown propagation of the guided wave in a configuration-phase modulator, and thus validated a whole technological process. Copyright © 2004 Society of Chemical Industry 1. Molecular structure of the 6FDA/MPDA monomer." @default.
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- W2035746692 date "2004-01-01" @default.
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- W2035746692 title "Design of a polymer-based phase modulator: validation of the various processes" @default.
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- W2035746692 doi "https://doi.org/10.1002/pi.1609" @default.
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