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- W2035788361 abstract "The r.f. sputtering of SiO2 in an ArO2 atmosphere was studied. The study was carried out to improve the insulating properties of films relative to those produced in a pure argon discharge which showed a clear aging effect on the losses. The O2 percentage was varied in the range 1%–4% of the total pressure. The improvement in the insulating properties consisted mainly in a stabilization of the electrical properties close to the best values reported for SiO2. The role of the oxygen is explained on the basis of annihilation of defects associated with oxygen vacancies in the SiO4 tetrahedral chains." @default.
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- W2035788361 date "1986-05-01" @default.
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- W2035788361 title "Sputtering of SiO2 in O2Ar atmospheres" @default.
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