Matches in SemOpenAlex for { <https://semopenalex.org/work/W2035791842> ?p ?o ?g. }
Showing items 1 to 96 of
96
with 100 items per page.
- W2035791842 endingPage "046501" @default.
- W2035791842 startingPage "046501" @default.
- W2035791842 abstract "Both contact and non-contact methods are used to analyze surface properties of three types of chemical mechanical planarization (CMP) pads: plain, X Y grooved, and concentrically grooved. Optical interferometry is used to probe the pad surface without contact and to produce a surface height probability density function (PDF). The right hand contacting tail of the PDF is often found to be exponential for CMP pads and a decay length (λ) as a measure of pad surface abruptness can be extracted. An incremental loading device is developed and used to measure the pad surface mechanical response. A pad–wafer contact model based on Greenwood and Williamson theory is used to interpret the nonlinear features of the pad surface compression data, which, furthermore, enables independent calculation of λ from mechanical data. Surface abruptness (λ) extracted from both methods (optical and mechanical) is found to be consistent for all three types of pads. No significant difference is observed in the pad surface abruptness among the three types of pads." @default.
- W2035791842 created "2016-06-24" @default.
- W2035791842 creator A5005111526 @default.
- W2035791842 creator A5013645218 @default.
- W2035791842 creator A5031843438 @default.
- W2035791842 creator A5056255939 @default.
- W2035791842 date "2010-04-01" @default.
- W2035791842 modified "2023-10-16" @default.
- W2035791842 title "Optical and Mechanical Characterization of Chemical Mechanical Planarization Pad Surfaces" @default.
- W2035791842 cites W179372779 @default.
- W2035791842 cites W1982877043 @default.
- W2035791842 cites W1993936378 @default.
- W2035791842 cites W2023152114 @default.
- W2035791842 cites W2063139385 @default.
- W2035791842 cites W2068972787 @default.
- W2035791842 cites W2075390235 @default.
- W2035791842 cites W2093333193 @default.
- W2035791842 doi "https://doi.org/10.1143/jjap.49.046501" @default.
- W2035791842 hasPublicationYear "2010" @default.
- W2035791842 type Work @default.
- W2035791842 sameAs 2035791842 @default.
- W2035791842 citedByCount "20" @default.
- W2035791842 countsByYear W20357918422012 @default.
- W2035791842 countsByYear W20357918422014 @default.
- W2035791842 countsByYear W20357918422015 @default.
- W2035791842 countsByYear W20357918422016 @default.
- W2035791842 countsByYear W20357918422017 @default.
- W2035791842 countsByYear W20357918422018 @default.
- W2035791842 countsByYear W20357918422019 @default.
- W2035791842 countsByYear W20357918422020 @default.
- W2035791842 crossrefType "journal-article" @default.
- W2035791842 hasAuthorship W2035791842A5005111526 @default.
- W2035791842 hasAuthorship W2035791842A5013645218 @default.
- W2035791842 hasAuthorship W2035791842A5031843438 @default.
- W2035791842 hasAuthorship W2035791842A5056255939 @default.
- W2035791842 hasConcept C120665830 @default.
- W2035791842 hasConcept C121332964 @default.
- W2035791842 hasConcept C138113353 @default.
- W2035791842 hasConcept C159985019 @default.
- W2035791842 hasConcept C160671074 @default.
- W2035791842 hasConcept C166689943 @default.
- W2035791842 hasConcept C171250308 @default.
- W2035791842 hasConcept C180088628 @default.
- W2035791842 hasConcept C180188523 @default.
- W2035791842 hasConcept C185544564 @default.
- W2035791842 hasConcept C192562407 @default.
- W2035791842 hasConcept C2524010 @default.
- W2035791842 hasConcept C2776799497 @default.
- W2035791842 hasConcept C2780009758 @default.
- W2035791842 hasConcept C2780841128 @default.
- W2035791842 hasConcept C33373654 @default.
- W2035791842 hasConcept C33923547 @default.
- W2035791842 hasConcept C41008148 @default.
- W2035791842 hasConcept C49040817 @default.
- W2035791842 hasConcept C77088390 @default.
- W2035791842 hasConceptScore W2035791842C120665830 @default.
- W2035791842 hasConceptScore W2035791842C121332964 @default.
- W2035791842 hasConceptScore W2035791842C138113353 @default.
- W2035791842 hasConceptScore W2035791842C159985019 @default.
- W2035791842 hasConceptScore W2035791842C160671074 @default.
- W2035791842 hasConceptScore W2035791842C166689943 @default.
- W2035791842 hasConceptScore W2035791842C171250308 @default.
- W2035791842 hasConceptScore W2035791842C180088628 @default.
- W2035791842 hasConceptScore W2035791842C180188523 @default.
- W2035791842 hasConceptScore W2035791842C185544564 @default.
- W2035791842 hasConceptScore W2035791842C192562407 @default.
- W2035791842 hasConceptScore W2035791842C2524010 @default.
- W2035791842 hasConceptScore W2035791842C2776799497 @default.
- W2035791842 hasConceptScore W2035791842C2780009758 @default.
- W2035791842 hasConceptScore W2035791842C2780841128 @default.
- W2035791842 hasConceptScore W2035791842C33373654 @default.
- W2035791842 hasConceptScore W2035791842C33923547 @default.
- W2035791842 hasConceptScore W2035791842C41008148 @default.
- W2035791842 hasConceptScore W2035791842C49040817 @default.
- W2035791842 hasConceptScore W2035791842C77088390 @default.
- W2035791842 hasIssue "4R" @default.
- W2035791842 hasLocation W20357918421 @default.
- W2035791842 hasOpenAccess W2035791842 @default.
- W2035791842 hasPrimaryLocation W20357918421 @default.
- W2035791842 hasRelatedWork W2027770176 @default.
- W2035791842 hasRelatedWork W2035791842 @default.
- W2035791842 hasRelatedWork W2046456942 @default.
- W2035791842 hasRelatedWork W2065922638 @default.
- W2035791842 hasRelatedWork W2100342067 @default.
- W2035791842 hasRelatedWork W2131667632 @default.
- W2035791842 hasRelatedWork W2343776758 @default.
- W2035791842 hasRelatedWork W2766317712 @default.
- W2035791842 hasRelatedWork W2805155845 @default.
- W2035791842 hasRelatedWork W2998783612 @default.
- W2035791842 hasVolume "49" @default.
- W2035791842 isParatext "false" @default.
- W2035791842 isRetracted "false" @default.
- W2035791842 magId "2035791842" @default.
- W2035791842 workType "article" @default.