Matches in SemOpenAlex for { <https://semopenalex.org/work/W2035823078> ?p ?o ?g. }
Showing items 1 to 88 of
88
with 100 items per page.
- W2035823078 endingPage "1248" @default.
- W2035823078 startingPage "1244" @default.
- W2035823078 abstract "The authors present a novel strategy for enhancing conformality in chemical vapor deposition (CVD) based on the concept of growth inhibition. In Part I, they showed how surface site blocking was responsible for the increase in conformality observed at higher pressures in high vapor pressure precursors. In this work, they apply this concept to enhance conformality by considering a secondary species that acts as an inhibitor of the precursor. The experimental results obtained for the growth of TiB2 from Ti(BH4)3dme (dme=dimethoxyethane), with dme acting as the growth inhibitor, agree well with the models, based on a first order adsorption/desorption kinetics, and show how this strategy greatly enhances the conformality of nonconformal precursors. Finally, they show how multiple surface mechanisms including surface site blocking, associative desorption, long surface residence time of by-products, or coadsorption of two reactants can induce growth inhibition. Consequently, this strategy can be potentially applied to many existing CVD systems, provided suitable molecular inhibitors are identified." @default.
- W2035823078 created "2016-06-24" @default.
- W2035823078 creator A5021296378 @default.
- W2035823078 creator A5027532222 @default.
- W2035823078 creator A5047058288 @default.
- W2035823078 creator A5050734459 @default.
- W2035823078 date "2009-09-01" @default.
- W2035823078 modified "2023-10-16" @default.
- W2035823078 title "Highly conformal film growth by chemical vapor deposition. II. Conformality enhancement through growth inhibition" @default.
- W2035823078 cites W1608097751 @default.
- W2035823078 cites W1853589413 @default.
- W2035823078 cites W1981826228 @default.
- W2035823078 cites W2008486820 @default.
- W2035823078 cites W2013231695 @default.
- W2035823078 cites W2019540284 @default.
- W2035823078 cites W2030853018 @default.
- W2035823078 cites W2042668277 @default.
- W2035823078 cites W2044957174 @default.
- W2035823078 cites W2067189528 @default.
- W2035823078 cites W2101659339 @default.
- W2035823078 doi "https://doi.org/10.1116/1.3207746" @default.
- W2035823078 hasPublicationYear "2009" @default.
- W2035823078 type Work @default.
- W2035823078 sameAs 2035823078 @default.
- W2035823078 citedByCount "27" @default.
- W2035823078 countsByYear W20358230782012 @default.
- W2035823078 countsByYear W20358230782013 @default.
- W2035823078 countsByYear W20358230782014 @default.
- W2035823078 countsByYear W20358230782015 @default.
- W2035823078 countsByYear W20358230782016 @default.
- W2035823078 countsByYear W20358230782018 @default.
- W2035823078 countsByYear W20358230782019 @default.
- W2035823078 countsByYear W20358230782020 @default.
- W2035823078 countsByYear W20358230782021 @default.
- W2035823078 countsByYear W20358230782022 @default.
- W2035823078 countsByYear W20358230782023 @default.
- W2035823078 crossrefType "journal-article" @default.
- W2035823078 hasAuthorship W2035823078A5021296378 @default.
- W2035823078 hasAuthorship W2035823078A5027532222 @default.
- W2035823078 hasAuthorship W2035823078A5047058288 @default.
- W2035823078 hasAuthorship W2035823078A5050734459 @default.
- W2035823078 hasConcept C127413603 @default.
- W2035823078 hasConcept C147789679 @default.
- W2035823078 hasConcept C150394285 @default.
- W2035823078 hasConcept C151730666 @default.
- W2035823078 hasConcept C162711632 @default.
- W2035823078 hasConcept C171250308 @default.
- W2035823078 hasConcept C185592680 @default.
- W2035823078 hasConcept C192562407 @default.
- W2035823078 hasConcept C2816523 @default.
- W2035823078 hasConcept C42360764 @default.
- W2035823078 hasConcept C57410435 @default.
- W2035823078 hasConcept C64297162 @default.
- W2035823078 hasConcept C86803240 @default.
- W2035823078 hasConceptScore W2035823078C127413603 @default.
- W2035823078 hasConceptScore W2035823078C147789679 @default.
- W2035823078 hasConceptScore W2035823078C150394285 @default.
- W2035823078 hasConceptScore W2035823078C151730666 @default.
- W2035823078 hasConceptScore W2035823078C162711632 @default.
- W2035823078 hasConceptScore W2035823078C171250308 @default.
- W2035823078 hasConceptScore W2035823078C185592680 @default.
- W2035823078 hasConceptScore W2035823078C192562407 @default.
- W2035823078 hasConceptScore W2035823078C2816523 @default.
- W2035823078 hasConceptScore W2035823078C42360764 @default.
- W2035823078 hasConceptScore W2035823078C57410435 @default.
- W2035823078 hasConceptScore W2035823078C64297162 @default.
- W2035823078 hasConceptScore W2035823078C86803240 @default.
- W2035823078 hasIssue "5" @default.
- W2035823078 hasLocation W20358230781 @default.
- W2035823078 hasOpenAccess W2035823078 @default.
- W2035823078 hasPrimaryLocation W20358230781 @default.
- W2035823078 hasRelatedWork W1996358191 @default.
- W2035823078 hasRelatedWork W2056604271 @default.
- W2035823078 hasRelatedWork W2100688936 @default.
- W2035823078 hasRelatedWork W2367655658 @default.
- W2035823078 hasRelatedWork W2380551708 @default.
- W2035823078 hasRelatedWork W2384918352 @default.
- W2035823078 hasRelatedWork W2748952813 @default.
- W2035823078 hasRelatedWork W2899084033 @default.
- W2035823078 hasRelatedWork W3208502522 @default.
- W2035823078 hasRelatedWork W4224436599 @default.
- W2035823078 hasVolume "27" @default.
- W2035823078 isParatext "false" @default.
- W2035823078 isRetracted "false" @default.
- W2035823078 magId "2035823078" @default.
- W2035823078 workType "article" @default.