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- W2035826562 abstract "Boron diffusion and activation at high concentrations are key problems in the formation of shallow P+ junctions. Therefore, it is necessary to understand and to predict accurately the dopant behaviour under these conditions. In this paper, the modelling of boron is discussed, by the use of a non-equilibrium point-defect model, including amorphization and a dynamic clustering component. The initial conditions are of major importance, not only for the transient enhanced diffusion, but also for the amount of active dopants. As a result, it is possible to obtain activation levels greater than the solid solubility, as observed experimentally." @default.
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- W2035826562 title "Modelling high concentration boron diffusion with dynamic clustering: influence of the initial conditions" @default.
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- W2035826562 doi "https://doi.org/10.1016/0026-2692(95)98924-g" @default.
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