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• W2035888476 endingPage "267" @default.
• W2035888476 startingPage "262" @default.
• W2035888476 abstract "Schottky barrier SOI-MOSFETs incorporating a La2O3/ZrO2 high-k dielectric stack deposited by atomic layer deposition are investigated. As the La precursor tris(N,N′-diisopropylformamidinato) lanthanum is used. As a mid-gap metal gate electrode TiN capped with W is applied. Processing parameters are optimized to issue a minimal overall thermal budget and an improved device performance. As a result, the overall thermal load was kept as low as 350, 400 or 500 °C. Excellent drive current properties, low interface trap densities of 1.9 × 1011 eV−1 cm−2, a low subthreshold slope of 70-80 mV/decade, and an ION/IOFF current ratio greater than 2 × 106 are obtained." @default.
• W2035888476 created "2016-06-24" @default.
• W2035888476 creator A5003393510 @default.
• W2035888476 creator A5012087886 @default.
• W2035888476 creator A5035851530 @default.
• W2035888476 creator A5076539942 @default.
• W2035888476 creator A5079352676 @default.
• W2035888476 creator A5079640986 @default.
• W2035888476 creator A5087737330 @default.
• W2035888476 date "2011-03-01" @default.
• W2035888476 modified "2023-10-16" @default.
• W2035888476 title "Schottky barrier SOI-MOSFETs with high-k La2O3/ZrO2 gate dielectrics" @default.
• W2035888476 cites W1965958956 @default.
• W2035888476 cites W1987684492 @default.
• W2035888476 cites W1995920390 @default.
• W2035888476 cites W2003645630 @default.
• W2035888476 cites W2004728987 @default.
• W2035888476 cites W2016908847 @default.
• W2035888476 cites W2020459349 @default.
• W2035888476 cites W2024572729 @default.
• W2035888476 cites W2036531528 @default.
• W2035888476 cites W2037719758 @default.
• W2035888476 cites W2042885998 @default.
• W2035888476 cites W2068583666 @default.
• W2035888476 cites W2089740672 @default.
• W2035888476 cites W2093011838 @default.
• W2035888476 cites W2101335269 @default.
• W2035888476 cites W2102507633 @default.
• W2035888476 cites W2123868695 @default.
• W2035888476 cites W2133800303 @default.
• W2035888476 cites W2153134211 @default.
• W2035888476 cites W2157679815 @default.
• W2035888476 cites W2157950330 @default.
• W2035888476 doi "https://doi.org/10.1016/j.mee.2010.11.003" @default.
• W2035888476 hasPubMedCentralId "https://www.ncbi.nlm.nih.gov/pmc/articles/3065308" @default.
• W2035888476 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/21461054" @default.
• W2035888476 hasPublicationYear "2011" @default.
• W2035888476 type Work @default.
• W2035888476 sameAs 2035888476 @default.
• W2035888476 citedByCount "16" @default.
• W2035888476 countsByYear W20358884762012 @default.
• W2035888476 countsByYear W20358884762017 @default.
• W2035888476 countsByYear W20358884762018 @default.
• W2035888476 countsByYear W20358884762019 @default.
• W2035888476 countsByYear W20358884762021 @default.
• W2035888476 countsByYear W20358884762022 @default.
• W2035888476 countsByYear W20358884762023 @default.
• W2035888476 crossrefType "journal-article" @default.
• W2035888476 hasAuthorship W2035888476A5003393510 @default.
• W2035888476 hasAuthorship W2035888476A5012087886 @default.
• W2035888476 hasAuthorship W2035888476A5035851530 @default.
• W2035888476 hasAuthorship W2035888476A5076539942 @default.
• W2035888476 hasAuthorship W2035888476A5079352676 @default.
• W2035888476 hasAuthorship W2035888476A5079640986 @default.
• W2035888476 hasAuthorship W2035888476A5087737330 @default.
• W2035888476 hasBestOaLocation W20358884761 @default.
• W2035888476 hasConcept C103566474 @default.
• W2035888476 hasConcept C113196181 @default.
• W2035888476 hasConcept C119599485 @default.
• W2035888476 hasConcept C127413603 @default.
• W2035888476 hasConcept C133386390 @default.
• W2035888476 hasConcept C147789679 @default.
• W2035888476 hasConcept C16115445 @default.
• W2035888476 hasConcept C16317505 @default.
• W2035888476 hasConcept C165801399 @default.
• W2035888476 hasConcept C166972891 @default.
• W2035888476 hasConcept C171250308 @default.
• W2035888476 hasConcept C172385210 @default.
• W2035888476 hasConcept C17525397 @default.
• W2035888476 hasConcept C185592680 @default.
• W2035888476 hasConcept C191897082 @default.
• W2035888476 hasConcept C192562407 @default.
• W2035888476 hasConcept C2361726 @default.
• W2035888476 hasConcept C2778413303 @default.
• W2035888476 hasConcept C2778802672 @default.
• W2035888476 hasConcept C2779227376 @default.
• W2035888476 hasConcept C2779851234 @default.
• W2035888476 hasConcept C43617362 @default.
• W2035888476 hasConcept C49040817 @default.
• W2035888476 hasConcept C51140833 @default.
• W2035888476 hasConcept C525849907 @default.
• W2035888476 hasConcept C53143962 @default.
• W2035888476 hasConcept C544956773 @default.
• W2035888476 hasConcept C69544855 @default.
• W2035888476 hasConcept C78434282 @default.
• W2035888476 hasConceptScore W2035888476C103566474 @default.
• W2035888476 hasConceptScore W2035888476C113196181 @default.
• W2035888476 hasConceptScore W2035888476C119599485 @default.
• W2035888476 hasConceptScore W2035888476C127413603 @default.
• W2035888476 hasConceptScore W2035888476C133386390 @default.
• W2035888476 hasConceptScore W2035888476C147789679 @default.
• W2035888476 hasConceptScore W2035888476C16115445 @default.
• W2035888476 hasConceptScore W2035888476C16317505 @default.
• W2035888476 hasConceptScore W2035888476C165801399 @default.
• W2035888476 hasConceptScore W2035888476C166972891 @default.
• W2035888476 hasConceptScore W2035888476C171250308 @default.
• W2035888476 hasConceptScore W2035888476C172385210 @default.
• W2035888476 hasConceptScore W2035888476C17525397 @default.

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