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- W2035889469 endingPage "206" @default.
- W2035889469 startingPage "123" @default.
- W2035889469 abstract "Since its original conception in the 1960s, the spreading resistance probe (SRP) has evolved into a reliable and quantitative tool for sub-micrometer, electrically active dopant, depth profiling in silicon. Its application limit has in recent years even been pushed down to ultra-shallow (sub-50 nm) structures. In this review, a systematic discussion is presented of all issues of importance for a high quality raw data collection and subsequent high accuracy data analysis. The main focus will be on the new developments over the last two decades. The qualification requirements to be fulfilled for 10% profile accuracy (in the absence of carrier spilling) and some of the main fields for SRP application in today's industry will be covered. Finally, a critical assessment of the technique will be made, and its future roadmap will be discussed." @default.
- W2035889469 created "2016-06-24" @default.
- W2035889469 creator A5037919272 @default.
- W2035889469 creator A5049003157 @default.
- W2035889469 creator A5056463388 @default.
- W2035889469 creator A5088335671 @default.
- W2035889469 date "2004-12-31" @default.
- W2035889469 modified "2023-10-17" @default.
- W2035889469 title "Characterization of electrically active dopant profiles with the spreading resistance probe" @default.
- W2035889469 cites W1201557413 @default.
- W2035889469 cites W1964340754 @default.
- W2035889469 cites W1968743028 @default.
- W2035889469 cites W1968982878 @default.
- W2035889469 cites W1969858876 @default.
- W2035889469 cites W1973000716 @default.
- W2035889469 cites W1981361435 @default.
- W2035889469 cites W1981650688 @default.
- W2035889469 cites W1982027647 @default.
- W2035889469 cites W1988017910 @default.
- W2035889469 cites W1988837818 @default.
- W2035889469 cites W1989896086 @default.
- W2035889469 cites W1992395792 @default.
- W2035889469 cites W1997644287 @default.
- W2035889469 cites W1999903388 @default.
- W2035889469 cites W2002013672 @default.
- W2035889469 cites W2002044424 @default.
- W2035889469 cites W2005989216 @default.
- W2035889469 cites W2007508056 @default.
- W2035889469 cites W2007831612 @default.
- W2035889469 cites W2008681644 @default.
- W2035889469 cites W2008970271 @default.
- W2035889469 cites W2010033870 @default.
- W2035889469 cites W2010429524 @default.
- W2035889469 cites W2011447437 @default.
- W2035889469 cites W2011780646 @default.
- W2035889469 cites W2016948141 @default.
- W2035889469 cites W2017452348 @default.
- W2035889469 cites W2019416552 @default.
- W2035889469 cites W2020900960 @default.
- W2035889469 cites W2027842382 @default.
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- W2035889469 cites W2036399395 @default.
- W2035889469 cites W2037753465 @default.
- W2035889469 cites W2039695470 @default.
- W2035889469 cites W2046753885 @default.
- W2035889469 cites W2046875974 @default.
- W2035889469 cites W2048536395 @default.
- W2035889469 cites W2051706976 @default.
- W2035889469 cites W2055902832 @default.
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- W2035889469 cites W2066698661 @default.
- W2035889469 cites W2067194431 @default.
- W2035889469 cites W2067860515 @default.
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- W2035889469 cites W2077523493 @default.
- W2035889469 cites W2081011511 @default.
- W2035889469 cites W2084463458 @default.
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- W2035889469 cites W2092316049 @default.
- W2035889469 cites W2092725625 @default.
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- W2035889469 cites W2094282805 @default.
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- W2035889469 cites W2094979447 @default.
- W2035889469 cites W2095329047 @default.
- W2035889469 cites W2098390322 @default.
- W2035889469 cites W2099384622 @default.
- W2035889469 cites W2106282549 @default.
- W2035889469 cites W2120255193 @default.
- W2035889469 cites W2123612126 @default.
- W2035889469 cites W2139736747 @default.
- W2035889469 cites W2143985968 @default.
- W2035889469 cites W2147679395 @default.
- W2035889469 cites W2152142595 @default.
- W2035889469 cites W2518762966 @default.
- W2035889469 cites W3034530591 @default.
- W2035889469 cites W414934819 @default.
- W2035889469 cites W600309565 @default.
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- W2035889469 doi "https://doi.org/10.1016/j.mser.2004.12.002" @default.
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