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• W2035983462 abstract "Elastic recoil detection analysis (ERDA) was performed to determine H and D concentration profiles near the (100) surfaces of epitaxially grown diamond films. The other elements were analyzed by Rutherford backscattering spectrometry (RBS) at the same time. Microwave plasma chemical vapor deposition (CVD) was used for the growth. After the growth, the specimens were treated with H2, H2O2, D2 or D2O2 plasma. The areal densities of H determined by ERDA ranged from 3 to 4 × 1015 atoms/cm2 near the surface of all specimens. Deuterium densities of the samples treated with D2 or D2O2 plasma ranged from 1 to 2 × 1015 atoms/cm2. These areal densities were two to three times larger than that of C atoms on the ideal (100) surface of diamond (∼ 1.6 × 1015 atoms/cm2)." @default.
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• W2035983462 date "1996-09-01" @default.
• W2035983462 modified "2023-10-08" @default.
• W2035983462 title "Hydrogen and deuterium profile in homoepitaxially grown CVD diamonds by ERDA method" @default.
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• W2035983462 doi "https://doi.org/10.1016/0168-583x(95)01471-3" @default.
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