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- W2035997811 abstract "A new bulge test device has been built, with the aim to perform mechanical tests on membranes with a thickness in the 100 nm to 10 µm range, between room temperature and 900°C. The first tests on Si3N4 and gold films give results consistent with literature data." @default.
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- W2035997811 date "2009-10-01" @default.
- W2035997811 modified "2023-09-26" @default.
- W2035997811 title "Investigation of the Mechanical Properties of Thin Films by Bulge Test" @default.
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- W2035997811 doi "https://doi.org/10.4028/www.scientific.net/ssp.156-158.477" @default.
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