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- W2036005695 abstract "In this work, nitric acid oxidation was studied to fabricate the tunneling oxide of nanocrystal memory devices. about 4 nm thick was formed through oxidizing the sputtered Si film by immersing in nitric acid solution for 60 s. After oxide formation, a rapid thermal annealing process set at for 30 s was used to improve oxide quality. In addition, the formed film was analyzed by X-ray photoelectron, capacitance–voltage, and current density–voltage measurements to study the process of the nitric acid oxidation. After the investigation of the nitric acid oxidized , a 6 nm thick cobalt silicide thin film was deposited and aggregated on the formed layer as the charge-trapping layer. The cobalt silicide nanocrystal memory device showed an obvious memory effect and good reliability, which confirms that the nitric acid oxidation method has potential for memory application." @default.
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- W2036005695 date "2010-01-01" @default.
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- W2036005695 title "Nitric Acid Oxidation of Si for the Tunneling Oxide Application on CoSi[sub 2] Nanocrystals Nonvolatile Memory" @default.
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- W2036005695 doi "https://doi.org/10.1149/1.3285172" @default.
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