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• W2036022014 abstract "In this work a systematic comparison of total reflection X-ray fluorescence (TXRF), synchrotron radiation-TXRF (SR-TXRF), time of flight secondary ion mass spectroscopy, lifetime, and deep level transient spectroscopy data of iron concentration is carried out. SR-TXRF is considered as a reference for the other techniques. Reasonably good correlations are obtained, though, as expected, SR-TXRF exhibits the maximum sensitivity among surface techniques. Among lifetime measurements, the electrolytic metal analysis tool (ELYMAT) technique shows the best sensitivity at very low concentrations. A method is developed to elaborate ELYMAT data in order to quantify iron concentration when more contaminants are simultaneously present. © 2004 The Electrochemical Society. All rights reserved." @default.
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• W2036022014 date "2004-01-01" @default.
• W2036022014 modified "2023-10-01" @default.
• W2036022014 title "Quantitative Evaluation of Iron at the Silicon Surface after Wet Cleaning Treatments" @default.
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• W2036022014 doi "https://doi.org/10.1149/1.1668993" @default.
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