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• W2036085816 endingPage "2611" @default.
• W2036085816 startingPage "2604" @default.
• W2036085816 abstract "We investigate the systematic error due to neglect of elastic scattering of photoelectrons in measurements of the thicknesses of thin films of SiO2 on Si by x-ray photoelectron spectroscopy (XPS). Calculations were made of substrate Si 2p photoelectron currents excited by Mg and Al Kα x rays for different SiO2 thicknesses, different angles of photoelectron emission, and three representative XPS configurations using an algorithm based on the transport approximation. We calculated practical effective attenuation lengths (EALs) from changes of the computed Si 2p photoelectron currents. These EALs were less than the corresponding inelastic mean free paths by between 6.5% and 9.4%, with the difference depending on the x-ray source, the specific range of SiO2 film thicknesses under consideration, the XPS configuration, and the range of photoelectron emission angles. Useful average values of the EAL were found for emission angles between 0° and about 60° (with respect to the surface normal) and for silicon dioxide thicknesses such that the substrate signal was attenuated to not more than 1% and 10% of its original value. Our calculated EALs are in satisfactory agreement with measured EALs. For larger emission angles, the calculated EALs change rapidly with SiO2 thickness, and specific values should be found for the conditions of interest." @default.
• W2036085816 created "2016-06-24" @default.
• W2036085816 creator A5057766761 @default.
• W2036085816 creator A5090840000 @default.
• W2036085816 date "2001-09-01" @default.
• W2036085816 modified "2023-10-15" @default.
• W2036085816 title "Influence of elastic-electron scattering on measurements of silicon dioxide film thicknesses by x-ray photoelectron spectroscopy" @default.
• W2036085816 cites W1971541512 @default.
• W2036085816 cites W1974324802 @default.
• W2036085816 cites W1983730600 @default.
• W2036085816 cites W1985306662 @default.
• W2036085816 cites W1987730200 @default.
• W2036085816 cites W1993995622 @default.
• W2036085816 cites W1996138724 @default.
• W2036085816 cites W1996970348 @default.
• W2036085816 cites W1999717456 @default.
• W2036085816 cites W1999795838 @default.
• W2036085816 cites W2004911401 @default.
• W2036085816 cites W2024575590 @default.
• W2036085816 cites W2025650953 @default.
• W2036085816 cites W2026076672 @default.
• W2036085816 cites W2028511212 @default.
• W2036085816 cites W2029345834 @default.
• W2036085816 cites W2032971505 @default.
• W2036085816 cites W2033809039 @default.
• W2036085816 cites W2049738552 @default.
• W2036085816 cites W2054859303 @default.
• W2036085816 cites W2060124282 @default.
• W2036085816 cites W2061065492 @default.
• W2036085816 cites W2066579729 @default.
• W2036085816 cites W2069654218 @default.
• W2036085816 cites W2070288488 @default.
• W2036085816 cites W2070642095 @default.
• W2036085816 cites W2074662104 @default.
• W2036085816 cites W2111937898 @default.
• W2036085816 cites W2136568334 @default.
• W2036085816 cites W2745714330 @default.
• W2036085816 cites W4241475900 @default.
• W2036085816 cites W2139706332 @default.
• W2036085816 doi "https://doi.org/10.1116/1.1397463" @default.
• W2036085816 hasPublicationYear "2001" @default.
• W2036085816 type Work @default.
• W2036085816 sameAs 2036085816 @default.
• W2036085816 citedByCount "34" @default.
• W2036085816 countsByYear W20360858162013 @default.
• W2036085816 countsByYear W20360858162016 @default.
• W2036085816 countsByYear W20360858162017 @default.
• W2036085816 countsByYear W20360858162019 @default.
• W2036085816 countsByYear W20360858162020 @default.
• W2036085816 countsByYear W20360858162022 @default.
• W2036085816 crossrefType "journal-article" @default.
• W2036085816 hasAuthorship W2036085816A5057766761 @default.
• W2036085816 hasAuthorship W2036085816A5090840000 @default.
• W2036085816 hasConcept C111368507 @default.
• W2036085816 hasConcept C113196181 @default.
• W2036085816 hasConcept C120665830 @default.
• W2036085816 hasConcept C121332964 @default.
• W2036085816 hasConcept C127313418 @default.
• W2036085816 hasConcept C159985019 @default.
• W2036085816 hasConcept C175708663 @default.
• W2036085816 hasConcept C184779094 @default.
• W2036085816 hasConcept C185592680 @default.
• W2036085816 hasConcept C191486275 @default.
• W2036085816 hasConcept C1924353 @default.
• W2036085816 hasConcept C192562407 @default.
• W2036085816 hasConcept C204323151 @default.
• W2036085816 hasConcept C2777289219 @default.
• W2036085816 hasConcept C43617362 @default.
• W2036085816 hasConcept C46141821 @default.
• W2036085816 hasConcept C49040817 @default.
• W2036085816 hasConcept C544956773 @default.
• W2036085816 hasConcept C71570822 @default.
• W2036085816 hasConceptScore W2036085816C111368507 @default.
• W2036085816 hasConceptScore W2036085816C113196181 @default.
• W2036085816 hasConceptScore W2036085816C120665830 @default.
• W2036085816 hasConceptScore W2036085816C121332964 @default.
• W2036085816 hasConceptScore W2036085816C127313418 @default.
• W2036085816 hasConceptScore W2036085816C159985019 @default.
• W2036085816 hasConceptScore W2036085816C175708663 @default.
• W2036085816 hasConceptScore W2036085816C184779094 @default.
• W2036085816 hasConceptScore W2036085816C185592680 @default.
• W2036085816 hasConceptScore W2036085816C191486275 @default.
• W2036085816 hasConceptScore W2036085816C1924353 @default.
• W2036085816 hasConceptScore W2036085816C192562407 @default.
• W2036085816 hasConceptScore W2036085816C204323151 @default.
• W2036085816 hasConceptScore W2036085816C2777289219 @default.
• W2036085816 hasConceptScore W2036085816C43617362 @default.
• W2036085816 hasConceptScore W2036085816C46141821 @default.
• W2036085816 hasConceptScore W2036085816C49040817 @default.
• W2036085816 hasConceptScore W2036085816C544956773 @default.
• W2036085816 hasConceptScore W2036085816C71570822 @default.
• W2036085816 hasIssue "5" @default.
• W2036085816 hasLocation W20360858161 @default.
• W2036085816 hasOpenAccess W2036085816 @default.
• W2036085816 hasPrimaryLocation W20360858161 @default.
• W2036085816 hasRelatedWork W1563898689 @default.
• W2036085816 hasRelatedWork W2000344605 @default.
• W2036085816 hasRelatedWork W2015304907 @default.

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