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- W2036141534 abstract "n -type doping of (001)-oriented single-crystalline diamond has been achieved using PH3 as doping gas and applying a newly optimized homoepitaxial growth technique based on plasma-enhanced chemical vapor deposition. Hall-effect measurements indicate n-type conductivity with highest mobilities of ∼350cm2∕Vs. Phosphorus doping is confirmed by secondary-ion mass spectroscopy." @default.
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- W2036141534 date "2005-05-27" @default.
- W2036141534 modified "2023-10-12" @default.
- W2036141534 title "n -type doping of (001)-oriented single-crystalline diamond by phosphorus" @default.
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- W2036141534 doi "https://doi.org/10.1063/1.1944228" @default.
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