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- W2036281990 abstract "A SiO2/Si18O2/Si system was prepared in two steps: a 200 Å thick SiO2 layer, 18O enriched (70%) was formed by anodic oxidation and an 800 Å layer of CVD SiO2 was deposited on top of the anodic oxide. Phosphorus and arsenic ion implantation through the Si16O2/Si18O2 layer was carried out at energies ranging from 25 to 200 keV. After chemical SiO2 removal, the energy dependence of the normalized 18O recoil yield was measured by the 18O(p,α) 15N reaction. Experimental and calculated values are discussed assuming a first order process and taking into account the fraction of implanted ion dose available at the Si16O2/Si18O2 interface." @default.
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- W2036281990 date "1981-04-01" @default.
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- W2036281990 title "Recoil implantation of oxygen from SiO2 thin films on silicon" @default.
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- W2036281990 doi "https://doi.org/10.1016/0029-554x(81)90681-9" @default.
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