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- W2036331954 abstract "— A chemical-vapor-deposition (CVD) method has been applied, for the first time, to a batch process for a-Si/SiN TFTs. The maximum process temperature was 500°C. High-performance TFTs with mobilities of 1.2 cm2/V-s, a threshold voltage of 4 V, and a subthreshold slope of 0.6 V/decade have been fabricated with good reproducibility and uniformity over a wide range of CVD conditions. This feature makes the a-Si/SiN TFT batch process practical." @default.
- W2036331954 created "2016-06-24" @default.
- W2036331954 creator A5012151008 @default.
- W2036331954 creator A5054456030 @default.
- W2036331954 creator A5081591416 @default.
- W2036331954 creator A5085894916 @default.
- W2036331954 date "1993-01-01" @default.
- W2036331954 modified "2023-09-24" @default.
- W2036331954 title "Batch processing of high-performance a-Si/SiN TFTs using a low-temperature hot-wall CVD method" @default.
- W2036331954 cites W1966212936 @default.
- W2036331954 cites W1967709922 @default.
- W2036331954 cites W1987201623 @default.
- W2036331954 cites W2024815341 @default.
- W2036331954 cites W2024940553 @default.
- W2036331954 cites W2026051534 @default.
- W2036331954 cites W2066832330 @default.
- W2036331954 cites W2082294209 @default.
- W2036331954 cites W2083891298 @default.
- W2036331954 cites W2083976024 @default.
- W2036331954 cites W2158799497 @default.
- W2036331954 cites W2544771231 @default.
- W2036331954 doi "https://doi.org/10.1889/1.1984857" @default.
- W2036331954 hasPublicationYear "1993" @default.
- W2036331954 type Work @default.
- W2036331954 sameAs 2036331954 @default.
- W2036331954 citedByCount "0" @default.
- W2036331954 crossrefType "journal-article" @default.
- W2036331954 hasAuthorship W2036331954A5012151008 @default.
- W2036331954 hasAuthorship W2036331954A5054456030 @default.
- W2036331954 hasAuthorship W2036331954A5081591416 @default.
- W2036331954 hasAuthorship W2036331954A5085894916 @default.
- W2036331954 hasConcept C103566474 @default.
- W2036331954 hasConcept C111919701 @default.
- W2036331954 hasConcept C119599485 @default.
- W2036331954 hasConcept C127413603 @default.
- W2036331954 hasConcept C151730666 @default.
- W2036331954 hasConcept C156465305 @default.
- W2036331954 hasConcept C165801399 @default.
- W2036331954 hasConcept C171250308 @default.
- W2036331954 hasConcept C172385210 @default.
- W2036331954 hasConcept C192562407 @default.
- W2036331954 hasConcept C195370968 @default.
- W2036331954 hasConcept C2779227376 @default.
- W2036331954 hasConcept C2816523 @default.
- W2036331954 hasConcept C41008148 @default.
- W2036331954 hasConcept C49040817 @default.
- W2036331954 hasConcept C57410435 @default.
- W2036331954 hasConcept C64297162 @default.
- W2036331954 hasConcept C86803240 @default.
- W2036331954 hasConcept C87359718 @default.
- W2036331954 hasConcept C98045186 @default.
- W2036331954 hasConceptScore W2036331954C103566474 @default.
- W2036331954 hasConceptScore W2036331954C111919701 @default.
- W2036331954 hasConceptScore W2036331954C119599485 @default.
- W2036331954 hasConceptScore W2036331954C127413603 @default.
- W2036331954 hasConceptScore W2036331954C151730666 @default.
- W2036331954 hasConceptScore W2036331954C156465305 @default.
- W2036331954 hasConceptScore W2036331954C165801399 @default.
- W2036331954 hasConceptScore W2036331954C171250308 @default.
- W2036331954 hasConceptScore W2036331954C172385210 @default.
- W2036331954 hasConceptScore W2036331954C192562407 @default.
- W2036331954 hasConceptScore W2036331954C195370968 @default.
- W2036331954 hasConceptScore W2036331954C2779227376 @default.
- W2036331954 hasConceptScore W2036331954C2816523 @default.
- W2036331954 hasConceptScore W2036331954C41008148 @default.
- W2036331954 hasConceptScore W2036331954C49040817 @default.
- W2036331954 hasConceptScore W2036331954C57410435 @default.
- W2036331954 hasConceptScore W2036331954C64297162 @default.
- W2036331954 hasConceptScore W2036331954C86803240 @default.
- W2036331954 hasConceptScore W2036331954C87359718 @default.
- W2036331954 hasConceptScore W2036331954C98045186 @default.
- W2036331954 hasLocation W20363319541 @default.
- W2036331954 hasOpenAccess W2036331954 @default.
- W2036331954 hasPrimaryLocation W20363319541 @default.
- W2036331954 hasRelatedWork W1982523101 @default.
- W2036331954 hasRelatedWork W1986871223 @default.
- W2036331954 hasRelatedWork W1998323333 @default.
- W2036331954 hasRelatedWork W2021027648 @default.
- W2036331954 hasRelatedWork W2023145751 @default.
- W2036331954 hasRelatedWork W2024940553 @default.
- W2036331954 hasRelatedWork W2032615557 @default.
- W2036331954 hasRelatedWork W2040856193 @default.
- W2036331954 hasRelatedWork W2043950693 @default.
- W2036331954 hasRelatedWork W2043963822 @default.
- W2036331954 hasRelatedWork W2046964997 @default.
- W2036331954 hasRelatedWork W2058369900 @default.
- W2036331954 hasRelatedWork W2063889900 @default.
- W2036331954 hasRelatedWork W2088905396 @default.
- W2036331954 hasRelatedWork W2090022466 @default.
- W2036331954 hasRelatedWork W2091901374 @default.
- W2036331954 hasRelatedWork W2124268520 @default.
- W2036331954 hasRelatedWork W2158783691 @default.
- W2036331954 hasRelatedWork W2168604999 @default.
- W2036331954 hasRelatedWork W2764726910 @default.
- W2036331954 isParatext "false" @default.
- W2036331954 isRetracted "false" @default.
- W2036331954 magId "2036331954" @default.
- W2036331954 workType "article" @default.