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- W2036483255 abstract "Various methods to reduce both global and local loading effect during non-selective and selective epitaxial growth of Si1-x-yGexCy (0.09 less than or equal to x less than or equal to 0.28 and 0 les ..." @default.
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- W2036483255 date "2004-06-01" @default.
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- W2036483255 title "Methods to reduce the loading effect in selective and non-selective epitaxial growth of sigec layers" @default.
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