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- W2036490564 abstract "This article presents a fabrication process for soft x-ray zone plates in which nickel and germanium are combined to achieve high diffraction efficiency. A nickel zone plate is first fabricated on a germanium film and then used as a hardmask for a CHF3-plasma etch into the germanium. Zone plates with 50–60 nm nickel and 110–150 nm of germanium are presented. The measured diffraction efficiencies were 10%–11% at λ=2.88 nm, which shows that high efficiency is possible even with thin nickel. Thus, the method has a potential for improving the efficiency of high-resolution zone plates for which the high-aspect-ratio structuring of nickel is difficult." @default.
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- W2036490564 date "2009-05-01" @default.
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- W2036490564 title "Nickel-germanium soft x-ray zone plates" @default.
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- W2036490564 doi "https://doi.org/10.1116/1.3117256" @default.
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