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- W2036503669 abstract "A system of in situ ultrasonic sensors has been developed that can be used to monitor the photoresist prebake process. A high frequency phase measurement monitors the resist film properties while a lower frequency time of flight measurement monitors the corresponding wafer temperature. The high frequency measurement involves calculating the phase of an ultrasound signal as it is reflected from the silicon/photoresist interface. As the photoresist film changes in thickness and viscoelastic properties, the phase of the reflected signal will change. In this way, it is possible to follow how the photoresist film changes as it bakes; the solvent evaporates from the resist, decreasing the thickness and increasing the density. Results indicate that there is a phase minimum at a repeatable temperature, believed to be the softening or glass transition temperature (T<SUB>g</SUB>). The lower frequency (200 kHz) time of flight measurement employs PZT-5H piezoelectric transducers bonded to a quartz buffer rod. The transducer generates a Lamb wave in the wafer which is then detected at another location by an identical transducer. The time of flight of the Lamb wave through the wafer depends linearly on temperature. Using these two sensors, we can measure the wafer temperature and the photoresist properties during prebake; providing us with the information necessary for in situ process control." @default.
- W2036503669 created "2016-06-24" @default.
- W2036503669 creator A5036041354 @default.
- W2036503669 creator A5049840465 @default.
- W2036503669 creator A5091243381 @default.
- W2036503669 date "1998-06-08" @default.
- W2036503669 modified "2023-09-27" @default.
- W2036503669 title "Ultrasonic cure and temperature monitoring of photoresist during the pre-exposure bake process" @default.
- W2036503669 doi "https://doi.org/10.1117/12.308733" @default.
- W2036503669 hasPublicationYear "1998" @default.
- W2036503669 type Work @default.
- W2036503669 sameAs 2036503669 @default.
- W2036503669 citedByCount "1" @default.
- W2036503669 crossrefType "proceedings-article" @default.
- W2036503669 hasAuthorship W2036503669A5036041354 @default.
- W2036503669 hasAuthorship W2036503669A5049840465 @default.
- W2036503669 hasAuthorship W2036503669A5091243381 @default.
- W2036503669 hasConcept C121332964 @default.
- W2036503669 hasConcept C134406635 @default.
- W2036503669 hasConcept C159985019 @default.
- W2036503669 hasConcept C160671074 @default.
- W2036503669 hasConcept C178790620 @default.
- W2036503669 hasConcept C185592680 @default.
- W2036503669 hasConcept C192562407 @default.
- W2036503669 hasConcept C199360897 @default.
- W2036503669 hasConcept C24890656 @default.
- W2036503669 hasConcept C2779227376 @default.
- W2036503669 hasConcept C2779843651 @default.
- W2036503669 hasConcept C41008148 @default.
- W2036503669 hasConcept C44280652 @default.
- W2036503669 hasConcept C49040817 @default.
- W2036503669 hasConcept C53524968 @default.
- W2036503669 hasConcept C56318395 @default.
- W2036503669 hasConcept C62520636 @default.
- W2036503669 hasConcept C72293138 @default.
- W2036503669 hasConcept C81288441 @default.
- W2036503669 hasConceptScore W2036503669C121332964 @default.
- W2036503669 hasConceptScore W2036503669C134406635 @default.
- W2036503669 hasConceptScore W2036503669C159985019 @default.
- W2036503669 hasConceptScore W2036503669C160671074 @default.
- W2036503669 hasConceptScore W2036503669C178790620 @default.
- W2036503669 hasConceptScore W2036503669C185592680 @default.
- W2036503669 hasConceptScore W2036503669C192562407 @default.
- W2036503669 hasConceptScore W2036503669C199360897 @default.
- W2036503669 hasConceptScore W2036503669C24890656 @default.
- W2036503669 hasConceptScore W2036503669C2779227376 @default.
- W2036503669 hasConceptScore W2036503669C2779843651 @default.
- W2036503669 hasConceptScore W2036503669C41008148 @default.
- W2036503669 hasConceptScore W2036503669C44280652 @default.
- W2036503669 hasConceptScore W2036503669C49040817 @default.
- W2036503669 hasConceptScore W2036503669C53524968 @default.
- W2036503669 hasConceptScore W2036503669C56318395 @default.
- W2036503669 hasConceptScore W2036503669C62520636 @default.
- W2036503669 hasConceptScore W2036503669C72293138 @default.
- W2036503669 hasConceptScore W2036503669C81288441 @default.
- W2036503669 hasLocation W20365036691 @default.
- W2036503669 hasOpenAccess W2036503669 @default.
- W2036503669 hasPrimaryLocation W20365036691 @default.
- W2036503669 hasRelatedWork W1769457273 @default.
- W2036503669 hasRelatedWork W2017277628 @default.
- W2036503669 hasRelatedWork W2030264254 @default.
- W2036503669 hasRelatedWork W2067529880 @default.
- W2036503669 hasRelatedWork W2069371907 @default.
- W2036503669 hasRelatedWork W2083793024 @default.
- W2036503669 hasRelatedWork W2129543168 @default.
- W2036503669 hasRelatedWork W2159510050 @default.
- W2036503669 hasRelatedWork W3215753468 @default.
- W2036503669 hasRelatedWork W4243781320 @default.
- W2036503669 isParatext "false" @default.
- W2036503669 isRetracted "false" @default.
- W2036503669 magId "2036503669" @default.
- W2036503669 workType "article" @default.