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- W2036553652 endingPage "1191" @default.
- W2036553652 startingPage "1191" @default.
- W2036553652 abstract "In the mapping of trace metal impurities on a Si wafer by the total reflection X-ray fluorescent (TXRF) analysis with use of monochromatic W-Lβ radiation, the trace metal impurity peaks as well as a main peak profile show a drastic change even with a slight translation of the measurement position on the wafer surface. This phenomenon is shown to arise from multiple effects: in the TXRF system (Technos TREX-610) the measurement point is adjusted by movements based on the polar coordinates and the incident X-ray beam is diffracted in the direction of the detector with high intensity when the Bragg-reflection condition is satisfied [I. Yakushiji et al .: Jpn. J. Appl. Phys. 31 (1992) 2872]. X-ray fluorescent peaks of Fe-Kα and Ni-Kα radiations with very small intensity were found to be influenced by the intensity of the W-Lβ radiation detected by the X-ray fluorescent detector. It is pointed out that this is very important in estimating the accuracy of the measurement data." @default.
- W2036553652 created "2016-06-24" @default.
- W2036553652 creator A5007615977 @default.
- W2036553652 creator A5036376192 @default.
- W2036553652 creator A5069681037 @default.
- W2036553652 creator A5089289540 @default.
- W2036553652 date "1993-03-01" @default.
- W2036553652 modified "2023-10-15" @default.
- W2036553652 title "Main Peak Profiles of Total Reflection X-Ray Fluorescence Analysis of Si(001) Wafers Excited by Monochromatic X-Ray Beam W-Lβ (II)" @default.
- W2036553652 cites W4251931670 @default.
- W2036553652 doi "https://doi.org/10.1143/jjap.32.1191" @default.
- W2036553652 hasPublicationYear "1993" @default.
- W2036553652 type Work @default.
- W2036553652 sameAs 2036553652 @default.
- W2036553652 citedByCount "17" @default.
- W2036553652 crossrefType "journal-article" @default.
- W2036553652 hasAuthorship W2036553652A5007615977 @default.
- W2036553652 hasAuthorship W2036553652A5036376192 @default.
- W2036553652 hasAuthorship W2036553652A5069681037 @default.
- W2036553652 hasAuthorship W2036553652A5089289540 @default.
- W2036553652 hasConcept C113196181 @default.
- W2036553652 hasConcept C120665830 @default.
- W2036553652 hasConcept C121332964 @default.
- W2036553652 hasConcept C160671074 @default.
- W2036553652 hasConcept C162170617 @default.
- W2036553652 hasConcept C168834538 @default.
- W2036553652 hasConcept C170395517 @default.
- W2036553652 hasConcept C178790620 @default.
- W2036553652 hasConcept C181500209 @default.
- W2036553652 hasConcept C184779094 @default.
- W2036553652 hasConcept C185592680 @default.
- W2036553652 hasConcept C192562407 @default.
- W2036553652 hasConcept C199360897 @default.
- W2036553652 hasConcept C207114421 @default.
- W2036553652 hasConcept C2779328170 @default.
- W2036553652 hasConcept C40833965 @default.
- W2036553652 hasConcept C41008148 @default.
- W2036553652 hasConcept C43617362 @default.
- W2036553652 hasConcept C49040817 @default.
- W2036553652 hasConcept C65682993 @default.
- W2036553652 hasConcept C71987851 @default.
- W2036553652 hasConcept C91881484 @default.
- W2036553652 hasConcept C93038891 @default.
- W2036553652 hasConceptScore W2036553652C113196181 @default.
- W2036553652 hasConceptScore W2036553652C120665830 @default.
- W2036553652 hasConceptScore W2036553652C121332964 @default.
- W2036553652 hasConceptScore W2036553652C160671074 @default.
- W2036553652 hasConceptScore W2036553652C162170617 @default.
- W2036553652 hasConceptScore W2036553652C168834538 @default.
- W2036553652 hasConceptScore W2036553652C170395517 @default.
- W2036553652 hasConceptScore W2036553652C178790620 @default.
- W2036553652 hasConceptScore W2036553652C181500209 @default.
- W2036553652 hasConceptScore W2036553652C184779094 @default.
- W2036553652 hasConceptScore W2036553652C185592680 @default.
- W2036553652 hasConceptScore W2036553652C192562407 @default.
- W2036553652 hasConceptScore W2036553652C199360897 @default.
- W2036553652 hasConceptScore W2036553652C207114421 @default.
- W2036553652 hasConceptScore W2036553652C2779328170 @default.
- W2036553652 hasConceptScore W2036553652C40833965 @default.
- W2036553652 hasConceptScore W2036553652C41008148 @default.
- W2036553652 hasConceptScore W2036553652C43617362 @default.
- W2036553652 hasConceptScore W2036553652C49040817 @default.
- W2036553652 hasConceptScore W2036553652C65682993 @default.
- W2036553652 hasConceptScore W2036553652C71987851 @default.
- W2036553652 hasConceptScore W2036553652C91881484 @default.
- W2036553652 hasConceptScore W2036553652C93038891 @default.
- W2036553652 hasIssue "3R" @default.
- W2036553652 hasLocation W20365536521 @default.
- W2036553652 hasOpenAccess W2036553652 @default.
- W2036553652 hasPrimaryLocation W20365536521 @default.
- W2036553652 hasRelatedWork W1967078042 @default.
- W2036553652 hasRelatedWork W1975637582 @default.
- W2036553652 hasRelatedWork W1995699677 @default.
- W2036553652 hasRelatedWork W2012461787 @default.
- W2036553652 hasRelatedWork W2017323663 @default.
- W2036553652 hasRelatedWork W2045772607 @default.
- W2036553652 hasRelatedWork W2058244294 @default.
- W2036553652 hasRelatedWork W2069030366 @default.
- W2036553652 hasRelatedWork W2093534825 @default.
- W2036553652 hasRelatedWork W2476083455 @default.
- W2036553652 hasVolume "32" @default.
- W2036553652 isParatext "false" @default.
- W2036553652 isRetracted "false" @default.
- W2036553652 magId "2036553652" @default.
- W2036553652 workType "article" @default.