Matches in SemOpenAlex for { <https://semopenalex.org/work/W2036580050> ?p ?o ?g. }
Showing items 1 to 69 of
69
with 100 items per page.
- W2036580050 endingPage "198" @default.
- W2036580050 startingPage "193" @default.
- W2036580050 abstract "Fluorinated amorphous carbon thin films (a-C:F) for low-dielectric-constant interlayer dielectrics were deposited by helicon-wave plasma-enhanced chemical vapor deposition using fluorocarbon compounds as a source material. The a-C:F films could be grown from C4F8 at a high deposition rate (above 400nm/min) and they were thermally stable up to 300°C. The addition of bias power to the substrate made it possible to completely fill gaps in the wiring (space 0.35μm, height 0.65μm) with the a-C:F film. To protect the a-C:F film during further processing, we deposited a SiO2 film to add mechanical strength and resistance to the oxygen plasma used to remove resist materials. The adhesion between the a-C:F and SiO2 films was dramatically improved by inserting an adhesion promoter consisting of a-C:H and Si-rich SiO2." @default.
- W2036580050 created "2016-06-24" @default.
- W2036580050 creator A5064701999 @default.
- W2036580050 creator A5084656869 @default.
- W2036580050 date "1999-01-01" @default.
- W2036580050 modified "2023-10-16" @default.
- W2036580050 title "Fluorinated Amorphous Carbon Thin Films for Multilevel Interconnections of Integrated Circuits." @default.
- W2036580050 doi "https://doi.org/10.2494/photopolymer.12.193" @default.
- W2036580050 hasPublicationYear "1999" @default.
- W2036580050 type Work @default.
- W2036580050 sameAs 2036580050 @default.
- W2036580050 citedByCount "1" @default.
- W2036580050 crossrefType "journal-article" @default.
- W2036580050 hasAuthorship W2036580050A5064701999 @default.
- W2036580050 hasAuthorship W2036580050A5084656869 @default.
- W2036580050 hasBestOaLocation W20365800501 @default.
- W2036580050 hasConcept C104779481 @default.
- W2036580050 hasConcept C119599485 @default.
- W2036580050 hasConcept C127413603 @default.
- W2036580050 hasConcept C134146338 @default.
- W2036580050 hasConcept C140205800 @default.
- W2036580050 hasConcept C159985019 @default.
- W2036580050 hasConcept C171250308 @default.
- W2036580050 hasConcept C185592680 @default.
- W2036580050 hasConcept C19067145 @default.
- W2036580050 hasConcept C192562407 @default.
- W2036580050 hasConcept C201931942 @default.
- W2036580050 hasConcept C49040817 @default.
- W2036580050 hasConcept C530198007 @default.
- W2036580050 hasConcept C56052488 @default.
- W2036580050 hasConcept C75937256 @default.
- W2036580050 hasConcept C8010536 @default.
- W2036580050 hasConceptScore W2036580050C104779481 @default.
- W2036580050 hasConceptScore W2036580050C119599485 @default.
- W2036580050 hasConceptScore W2036580050C127413603 @default.
- W2036580050 hasConceptScore W2036580050C134146338 @default.
- W2036580050 hasConceptScore W2036580050C140205800 @default.
- W2036580050 hasConceptScore W2036580050C159985019 @default.
- W2036580050 hasConceptScore W2036580050C171250308 @default.
- W2036580050 hasConceptScore W2036580050C185592680 @default.
- W2036580050 hasConceptScore W2036580050C19067145 @default.
- W2036580050 hasConceptScore W2036580050C192562407 @default.
- W2036580050 hasConceptScore W2036580050C201931942 @default.
- W2036580050 hasConceptScore W2036580050C49040817 @default.
- W2036580050 hasConceptScore W2036580050C530198007 @default.
- W2036580050 hasConceptScore W2036580050C56052488 @default.
- W2036580050 hasConceptScore W2036580050C75937256 @default.
- W2036580050 hasConceptScore W2036580050C8010536 @default.
- W2036580050 hasIssue "2" @default.
- W2036580050 hasLocation W20365800501 @default.
- W2036580050 hasOpenAccess W2036580050 @default.
- W2036580050 hasPrimaryLocation W20365800501 @default.
- W2036580050 hasRelatedWork W1591644085 @default.
- W2036580050 hasRelatedWork W1975928855 @default.
- W2036580050 hasRelatedWork W1991334853 @default.
- W2036580050 hasRelatedWork W1993061656 @default.
- W2036580050 hasRelatedWork W2042344590 @default.
- W2036580050 hasRelatedWork W2046126859 @default.
- W2036580050 hasRelatedWork W2060147321 @default.
- W2036580050 hasRelatedWork W2380860136 @default.
- W2036580050 hasRelatedWork W2535130784 @default.
- W2036580050 hasRelatedWork W2624519842 @default.
- W2036580050 hasVolume "12" @default.
- W2036580050 isParatext "false" @default.
- W2036580050 isRetracted "false" @default.
- W2036580050 magId "2036580050" @default.
- W2036580050 workType "article" @default.