Matches in SemOpenAlex for { <https://semopenalex.org/work/W2036664332> ?p ?o ?g. }
Showing items 1 to 46 of
46
with 100 items per page.
- W2036664332 abstract "Waycoat WX-159 is a positive resist designed for use with optical aligners operating in the mid-UV (280-320 nm). Spectral data is presented indicating potential applications of WX-159 resist in the deep UV (220-280 nm) and near UV (330-400 nm) as well. Data are presented demonstrating the use of WX-159 in conventional UV as well as the mid-UV regime. The resist with both metal containing and metal ion free developers is characterized by two techniques: 1) contrast curve of remaining film thickness after development versus exposure energy, and 2) dissolution rate monitor comparison of exposed and unexposed WX-159 films. The impact of developer composition on resist profile is shown wherein WX-402 developer produces near vertical, flat topped, micron size WX-159 images.© (1983) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only." @default.
- W2036664332 created "2016-06-24" @default.
- W2036664332 creator A5011330462 @default.
- W2036664332 creator A5084605067 @default.
- W2036664332 date "1983-11-07" @default.
- W2036664332 modified "2023-09-23" @default.
- W2036664332 title "<title>New Positive Resist Designed For Use In The Mid Ultraviolet</title>" @default.
- W2036664332 doi "https://doi.org/10.1117/12.935130" @default.
- W2036664332 hasPublicationYear "1983" @default.
- W2036664332 type Work @default.
- W2036664332 sameAs 2036664332 @default.
- W2036664332 citedByCount "1" @default.
- W2036664332 crossrefType "proceedings-article" @default.
- W2036664332 hasAuthorship W2036664332A5011330462 @default.
- W2036664332 hasAuthorship W2036664332A5084605067 @default.
- W2036664332 hasConcept C171250308 @default.
- W2036664332 hasConcept C192562407 @default.
- W2036664332 hasConcept C2776798109 @default.
- W2036664332 hasConcept C2779227376 @default.
- W2036664332 hasConcept C41008148 @default.
- W2036664332 hasConcept C49040817 @default.
- W2036664332 hasConcept C53524968 @default.
- W2036664332 hasConceptScore W2036664332C171250308 @default.
- W2036664332 hasConceptScore W2036664332C192562407 @default.
- W2036664332 hasConceptScore W2036664332C2776798109 @default.
- W2036664332 hasConceptScore W2036664332C2779227376 @default.
- W2036664332 hasConceptScore W2036664332C41008148 @default.
- W2036664332 hasConceptScore W2036664332C49040817 @default.
- W2036664332 hasConceptScore W2036664332C53524968 @default.
- W2036664332 hasLocation W20366643321 @default.
- W2036664332 hasOpenAccess W2036664332 @default.
- W2036664332 hasPrimaryLocation W20366643321 @default.
- W2036664332 hasRelatedWork W2030629592 @default.
- W2036664332 hasRelatedWork W2030938525 @default.
- W2036664332 hasRelatedWork W2088899554 @default.
- W2036664332 hasRelatedWork W2095155031 @default.
- W2036664332 hasRelatedWork W2120297922 @default.
- W2036664332 hasRelatedWork W2332387701 @default.
- W2036664332 hasRelatedWork W2616942956 @default.
- W2036664332 hasRelatedWork W2899084033 @default.
- W2036664332 hasRelatedWork W3039262615 @default.
- W2036664332 hasRelatedWork W3097756607 @default.
- W2036664332 isParatext "false" @default.
- W2036664332 isRetracted "false" @default.
- W2036664332 magId "2036664332" @default.
- W2036664332 workType "article" @default.